Ukwenziwa kweSemiconductor kufuna ukuchaneka okugqithisileyo, kwaye igumbi-intliziyo yezixhobo ezibalulekileyo ezifana ne-CVD reactors kunye noomatshini be-etching-idlala indima ebalulekileyo. Esi sikhokelo siphonononga izinto ezibalulekileyo zoyilo lwegumbi kunye nendlela i-alloys ephezulu ye-aluminium ecocekileyo exazulula ngayo imingeni ephambili yoshishino.

Izinto ezi-5 ezibalulekileyo zokuSebenza kweGumbi lokuQhuba (Kwaye nendlela iAluminiyam eGqwesileyo)

1. I-Ultra-High Vacuum (UHV) Ukuhambelana kunye noThintelo lokuvuza

Ingxaki: Ukuvuza kweMicroscopic kuyonakalisa inkqubo yokuthembeka.

IAluminiyam eluncedo:Imizimba ye-CNC engenamthungoukusuka kwiibhiliti ze-aluminium zisusa amanqaku e-weld. I-alloy yethu ye-6061-T6 ifezekisa <10⁻⁹ mbar·L/sec amazinga okuvuza kwe-helium.

2. Ulawulo lwe-Thermal: Uzinzo phantsi kwe-Bicycle Extreme

Ingxaki: I-thermal warping ibangela ukungcoliseka kwamasuntswana.

Isisombululo: I-Aluminiyam ephezulu ye-thermal conductivity (≈150 W / m·K) igqithise insimbi engenasici. Iipleyiti zethu ze-aluminiyam ezenziwe ngokwezifiso zidibanisa imijelo yokupholisa i-± 0.5 ° C efanayo.

3. I-Plasma Corrosion Resistance kwi-Environmental Environments

Indawo yeDatha: I-aluminiyam e-Anodized (25μm + ubukhulu) iyamelana ne-10x ubude be-CF₄ / O₂ i-plasma exposure vs.

4. IMagnetic Permeability: RF/Plasma Process Integrity

Kutheni iAluminiyam? I-Near-zero magnetic permeability inqanda ukugqwetheka kwentsimi kwi-etchers / implanters.

5. Iindleko vs. UPhuculo lokuSebenza

I-Case Study: Ukutshintshwa komatshini ococekileyoamagumbi anealuminiyamkunciphisa iindleko zezinto eziphathekayo nge-40% kunye nexesha lomatshini nge-35% (ngokusekelwe kwi-benchmarks ye-2024 yoshishino).

Izisombululo zethu zeAluminiyam zamagumbi achanekileyo

Iibhodi zeChamber & Lids

Izinto eziphathekayo: 5083/6061 Aluminiyam Amacwecwe (ukuya kuthi ga kwi-150mm ubukhulu)

Inkqubo: Vacuum-ehambelanayo CNC machining kunye Ra ≤ 0.8μm umphezulu ukugqiba

Iimpawu eziphambili: I-AMS 2772 unyango lokushisa, i-100% yovavanyo lwe-ultrasonic

Amacandelo okuSasazwa kweGesi

Iimveliso: Iityhubhu ze-aluminium ezichanekileyo (OD 3mm-200mm) kunye ne-micro-bores yangaphakathi

Ubuchwephesha: I-deep-hole drilling (L / D ratio 30: 1), electropolishing

IiNkxaso zoLwakhiwo kunye neeFasteners

Izinto eziphathekayo: 7075-T651 Aluminium Rods (umlinganiselo ophezulu wamandla ukuya kubunzima)

Ukuthotyelwa: Imigangatho ye-SEMI F72 yolawulo lokukhupha umoya

Kutheni usebenzisana nathi kwiProjekthi yeGumbi leSemiconductor?

1. I-Dedicated Cleanroom Machining: Isixhobo se-Class 1000 sithintela ukungcoliseka kwe-particle.

2. Material Traceability: Mill iingxelo zovavanyo lweipleyiti yonke aluminiyam/intonga/umbhobho.

3. Ukugqitywa kwePlasma-Optimized Finishing: I-proprietary passivation yokumelana nokubola.

4. I-Prototyping eKhawulezayo: Ixesha elikhokelayo leentsuku ezili-15 kwiijometri zegumbi elintsonkothileyo.