Indasteri ea semiconductor e hloka thepa e leka-lekaneng matla a ikhethang a mechini, botsitso bo nepahetseng ba litekanyo, tsamaiso e phahameng ea mocheso, le litekanyetso tse tiileng tsa bohloeki. Jwalo ka mofani oa mantlha oa litharollo tsa aluminium tse sebetsang hantle, ronaLi-alloy tsa aluminium tsa letoto la 6000—haholo-holo 6061-T6/T651, 6063-T5/T6, le mefuta e ikhethileng ea sehlopha sa semiconductor—li entsoe ho fihlela litlhoko tse thata tsa tlhahiso ea lisebelisoa tsa semiconductor, litsamaiso tsa ts'ebetso ea wafer, le tlhahiso ea likarolo tse nepahetseng. Tataiso ena e hlahloba thepa ea thepa, melemo ea bohlokoa, lits'ebetso tsa tlhahiso, le maemo a ts'ebeliso ea lihlahisoa tsa rona tsa aluminium tsa letoto la 6000, tse etselitsoeng ho tšehetsa bareki ba lefats'e ba semiconductor ho fihlela chai e phahameng, katleho e ntlafetseng ea ts'ebetso, le ts'ebetso e tšepahalang ea nako e telele.

1. Thepa ea Bohlokoa ea Lisebelisoa tsa Aluminium tsa Li-Alloy tsa 6000 Series bakeng sa Li-semiconductors

Li-alloy tsa aluminium tse 6000 letotong ke tsa sistimi ea Al-Mg-Si, 'me magnesium (Mg) le silicon (Si) e le likarolo tsa mantlha tsa ho kopanya, tse nolofalletsang ho matlafatsoa ka mocheso ka ho thehoa ha li-precipitate tsa Mg₂Si. Bakeng sa lits'ebetso tsa semiconductor, re ntlafatsa sebopeho sa alloy le kalafo ea mocheso ho beha pele litekanyo tse 'ne tsa bohlokoa tsa ts'ebetso:

a. Matla a Mekaniki le Botsitso ba Dikarolo

Aluminium ea rona ea 6061-T6/T651 e fana ka matla a ho thaepa a 276–310 MPa le matla a tlhahiso a 220–252 MPa, e fana ka bokhoni bo matla ba ho jara moroalo bakeng sa likarolo tsa sebopeho mechineng ea ho betla ea semiconductor, litsamaiso tsa ho beha, le liroboto tse sebetsanang le wafer [4]. Boemo ba khatello ea T651 bo imollang khatello ea maikutlo bo ntlafatsa botsitso ba litekanyo, bo fokotsa ho feto-fetoha ha mocheso le khatello ea mechine - e leng ea bohlokoa bakeng sa ho boloka ho nepahala ha boemo ba submicron lisebelisoa tsa tlhahiso ea semiconductor.

Bakeng sa lits'ebetso tse hlokang ho qeta hantle le ho bōpeha ha bokaholimo, joalo ka lisebelisoa tsa semiconductor tse nepahetseng le liforeimi tsa carrier tsa wafer, aluminium ea rona ea 6063-T5/T6 e fana ka boemo bo leka-lekaneng ka matla a ho tensile a 200–240 MPa le botsitso bo botle ba extrusion, ho netefatsa taolo e tiileng ea mamello (± 0.05 mm) bakeng sa likarolo tse rarahaneng tsa sebopeho [9]. Li-alloy ka bobeli li bontša boima bo tlase ba 2.70 g/cm³, e fokotsang boima ka kakaretso ba lisebelisoa tsa semiconductor ntle le ho beha botšepehi ba sebopeho kotsing - molemo oa bohlokoa bakeng sa litsamaiso tsa ho sebetsana ka boiketsetso le thepa e hloekileng ea kamore.

b. Tshebetso ea Thermal

Taolo ea mocheso ke ea bohlokoa haholo ts'ebetsong ea semiconductor, moo ho feto-fetoha ho feteletseng ha mocheso ho ka bakang ho oa ha wafer, ho se lumellane hantle, kapa ho fokotseha ha chai ea sesebelisoa. Li-alloy tsa rona tsa aluminium tsa letoto la 6000 li fana ka conductivity e phahameng ea mocheso: 6061-T6 e fana ka 180–210 W/(m·K), ha 6063-T6 e fana ka 205–220 W/(m·K), e sebetsang hantle ho feta tšepe e sa hloekang ka ho feta 300% le ho nolofalletsa ho qhala ha mocheso ka potlako, ka mokhoa o ts'oanang.

Re ntlafatsa botsitso ba mocheso ka ho laola ka thata likarolo tsa litšila (mohlala, Fe, Cu, Zn), ho fokotsa coefficient ea katoloso ea mocheso ho 22–24 × 10⁻⁶/°C (20–100°C). Sena se fokotsa phetoho ea mocheso nakong ea mehato ea ts'ebetso ea mocheso o phahameng joalo ka ho annealing le sintering, ho netefatsa hore likarolo tsa bohlokoa li boloka litekanyo tse nepahetseng ho pholletsa le potoloho ea tlhahiso.

c. Bohloeki le Khanyetso ea Tšilafalo

Tikoloho tsa tlhahiso ea semiconductor li hloka ho tsoa ha khase ka tlase haholo le ho ntša likaroloana ho thibela tšilafalo ea wafer. Li-alloy tsa rona tsa sehlopha sa semiconductor tsa 6000 li hlahisoa ka thepa e tala e hloekileng haholo le lits'ebetso tsa ho hloekisa tse ikhethileng, li fokotsa likhase tse setseng ho <0.15 ml/100g Al le bongata ba likaroloana ho <5 likaroloana/cm² (>0.5 μm).

Re kenya tshebetsong diprothokholo tse tiileng tsa kalafo ya bokahodimo, ho kenyeletswa le ho hlwekisa ka motlakase le ho omisa (botenya ba 10–50 μm), ho theha lera le teteaneng, le sireletsang la oxide le hanelang ho bola ho tswa ho disebediswa tsa ho hlwekisa tsa dikhemikhale (mohlala, HF, H₂SO₄) le ho thibela ho kgomarela ha dikarolwana. Sena se etsa hore dialloy tsa rona di be ntle bakeng sa diteishene tsa ho sebetsana le metsi, ditsamaiso tsa ho tlisa dikhemikhale, le dikarolo tsa kamore ya vacuum moo taolo ya tshilafatso e sa buisanweng.

d. Ho tenyetseha ha ho sebetsa le ho etsoa ha thepa

Li-alloy tsa rona tsa aluminium tsa letoto la 6000 li ntlafalitsoe bakeng samochini o sebetsang hantle oa CNC,ka ts'ebetso e ntle ea ho tlosa li-chip le ho senyeha ha lisebelisoa ho fokolang. 6061-T6 e fana ka ho tjheseletsa ho hotle, e nolofalletsang ho etsoa ha li-assemblies tse kholo tsa meaho ka botšepehi bo phahameng, ha 6063-T6 e ipabola lits'ebetsong tsa ho ntša le ho kobeha, e tšehetsa tlhahiso ea liprofaele tse rarahaneng tse kang li-heat sinks, li-tube tsa ho tlisa mokelikeli, le matlo a sensor.

Re fana ka mefuta e felletseng ea lihlahisoa—ho kenyeletsoa lipoleiti tsa aluminium (botenya ba 0.5–200 mm), li-bar (bophara ba 10–500 mm), li-tube (bophara ba kantle ba 5–300 mm), le li-profile tse entsoeng ka mokhoa o ikhethileng—ho fihlela litlhoko tse fapaneng tsa likarolo tsa semiconductor. Lihlahisoa tsohle li hlahlojoa ka thata, ho kenyeletsoa ho nepahala ha boholo, ho ba thata ha bokaholimo (Ra ≤ 0.2 μm), le netefatso ea thepa ea mechini, ho netefatsa ho latela maemo a machaba (ASTM, ISO, JIS).

2. Melemo ea Bohlokoa ea Aluminium ea Rona ea 6000 Series bakeng sa Bareki ba Semiconductor

a. Litharollo tsa Lintho tse Ikhethileng

Re sebetsa haufi-ufi le bareki ho etsa hore li-alloy tsa letoto la 6000 li lumellane le litlhoko tse itseng tsa kopo:

- Semiconductor-grade 6061 SP: E ntlafalitsoe bakeng sa lits'ebetso tsa bohloeki bo phahameng joalo ka lisebelisoa tsa ho kenya li-ion le litsamaiso tsa tlhahlobo ea wafer, ka ts'ebetso e ntlafalitsoeng ea anodization le phokotso ea ho tsoa ha khase.

- Matla a phahameng 6061-T651: E loketse likarolo tsa sebopeho tse boima lisebelisoa tsa lithography tsa semiconductor le likamore tsa ts'ebetso, e fanang ka botsitso bo phahameng ba boholo tlas'a maemo a feteletseng a ts'ebetso.

- 6063-T6 e ntlafaditsweng ka ho ntsha mocheso: E loketse disinki tsa mocheso tse nepahetseng haholo, ditsamaiso tsa ho phodisa metsi, le disebediswa tse nepahetseng, tse nang le qetello e ntle ya bokahodimo le mamello e tiileng ya ho ntsha mocheso.

b. Tšepo ea Ketane ea Phepelo ho tloha Qetellong ho isa Qetellong

Jwalo ka moetsi wa aluminium ya fanang ka tshebeletso e felletseng, re fana ka tshehetso ya ho tloha qalong ho isa qetellong, ho tloha kgethong ya thepa e tala le moralo wa alloy ho isa ho machining e nepahetseng le kalafo ya bokahodimo. Sistimi ya rona ya taolo ya boleng ba ka hare e netefatsa ho sala morao tshebetsong yohle ya tlhahiso, mme sehlopha se seng le se seng se tsamaya le ditlaleho tse qaqileng tsa teko ho kenyeletswa le sebopeho sa dikhemikhale, thepa ya mechini, le data ya bohloeki. Re boetse re fana ka taolo e tenyetsehang ya thepa le phano ya thepa ka nako e nepahetseng, re tshehetsa mehlala ya tlhahiso ya bareki ba semiconductor ka nako e nepahetseng le ho fokotsa dikotsi tsa ketane ya phepelo.

c. Tshebetso e Bolokang Ditjeo

Ha ho bapisoa le thepa e 'ngoe e kang tšepe e sa ruseng le titanium, li-alloy tsa rona tsa aluminium tsa letoto la 6000 li fana ka karolelano e phahameng ea matla-ho-boima ka litšenyehelo tse tlase, li fokotsa litšenyehelo tsa tlhahiso ea lisebelisoa ka 20-30% ha li ntse li ntlafatsa ts'ebetso ea matla. Ho sebetsa hantle ha li-alloy tsa rona ho fokotsa nako ea tlhahiso le litšenyehelo tsa lisebelisoa, ho ntlafatsa ts'ebetso e akaretsang bakeng sa bahlahisi ba lisebelisoa tsa semiconductor le basebelisi ba ho qetela.

3. Maemo a Tloaelehileng a Ts'ebeliso Tlhahisong ea Semiconductor

a. Likarolo tsa Sebopeho sa Lisebelisoa tsa Semiconductor

Lipoleiti le li-bars tsa rona tsa aluminium tsa 6061-T6/T651 li sebelisoa haholo ho etseng liforeimi tsa lisebelisoa tse ka sehloohong, 'mele ea likamore, le meaho e tšehetsang bakeng sa litsamaiso tsa ho fata, ho beha le ho hokela. Matla a phahameng le botsitso ba likarolo tsena tsa alloy li netefatsa ts'epo ea nako e telele ea lisebelisoa tsa mantlha, ha motlakase o phahameng o tšehetsa ts'ebetso e tsitsitseng tlas'a maemo a ts'ebetso e tsoelang pele.

b. Ho Sebetsana le ho Lokisa Wafer ka Botlalo

Lisebelisoa tsa aluminium tsa 6063-T6 le likarolo tse entsoeng ka mechini li loketse ho jara li-wafer, liroboto tsa phetisetso, le lisebelisoa tsa ho beha lintho sebakeng sa tsona. Qetello e ntle ea bokaholimo le tlhahiso e tlase ea likaroloana tsa lihlahisoa tsena li thibela tšenyo le tšilafalo ea li-wafer, ha moralo o bobebe o ntlafatsa lebelo le ho nepahala ha litsamaiso tsa ho sebetsana le tsona ka boiketsetso.

c. Mekhoa ea Tsamaiso ea Thermal

Ho khanna ha mocheso o phahameng ho etsa horeLi-alloy tsa aluminium tsa letoto la 6000khetho e ratoang bakeng sa lisinki tsa mocheso tsa semiconductor, lipoleiti tsa ho pholisa, le liphaephe tsa ho tsamaisa metsi. Ebang ke li-module tsa laser tse matla haholo kapa litsamaisong tsa taolo ea mocheso oa wafer, li-alloy tsa rona li qhala mocheso ka katleho, li boloka mocheso o tsitsitseng oa ts'ebetso le ho ntlafatsa chai ea sesebelisoa.

d. Mekhoa ea ho Sebelisa Lik'hemik'hale le Vacuum

Aluminium ea rona ea sehlopha sa 6000 sa semiconductor-grade, e nang le khanyetso e matlafalitsoeng ea mafome le khase e fokolang, e loketse liteishene tsa ho hloekisa ka metsi, liphaephe tsa ho isa lik'hemik'hale, le likarolo tsa kamore ea vacuum. Lera la bokaholimo le nang le anodized le hanela khoholeho ea lik'hemik'hale, le netefatsa bophelo ba ts'ebeletso ea nako e telele le ho fokotsa litšenyehelo tsa tlhokomelo bakeng sa mela ea tlhahiso ea semiconductor.

4. Taolo ea Boleng le Setifikeiti

Lihlahisoa tsohle tsa rona tsa aluminium tsa letoto la 6000 bakeng sa lits'ebetso tsa semiconductor li latela maemo a machaba a boleng le polokeho, ho kenyeletsoa le maemo a ISO 9001, ISO 14001, le SEMICON bakeng sa lisebelisoa tsa semiconductor. Re kenya tšebetsong sistimi e felletseng ea taolo ea boleng, ka taolo e tiileng mohatong o mong le o mong:

a. Tlhahlobo ea Thepa e Tala: Li-ingot tsa aluminium tse hloekileng haholo (bohloeki ba 99.9%) lia lekoa bakeng sa litaba tse litšila ho netefatsa boleng ba thepa ea motheo.

b. Ho qhibilihisa le ho Hloekisa: Mekhoa ea ho hloekisa beng ba thepa (enjene ea ho potoloha ha khase ea argon, ho ntša khase ka inthanete) e fokotsa litaba tsa haeterojene le lintho tse kenyellelitsoeng, e ntlafatsa bongata ba thepa le bohloeki.

c. Kalafo ea Mocheso: Tharollo e tiileng e laoloang ka nepo (515–530°C) le mekhoa ea botsofali ba maiketsetso (160–190°C) e ntlafatsa litšobotsi tsa mechini le botsitso ba mocheso.

d. Kalafo ea Mechini le Bokaholimo: Mechini ea CNC e nang le lisebelisoa tse nepahetseng haholo e netefatsa ho nepahala ha litekanyo; ho polishing ka motlakase le anodization li etsoa libakeng tse hloekileng tsa kamore ho fihlela litlhoko tsa taolo ea tšilafalo.

e. Tlhahlobo ea ho Qetela: Tlhahlobo ea 100% ea li-parameter tsa bohlokoa—ho kenyeletsoa mamello ea boholo, ho ba thata ha bokaholimo, matla a mechini le bohloeki—e netefatsa botsitso le ts'epo ea sehlahisoa.

5. Hobaneng o lokela ho kgetha di-alloy tsa rona tsa Aluminium tsa letoto la 6000?

Ka lilemo tse ngata tsa boiphihlelo lefapheng la thepa ea aluminium, re fumane temohisiso e tebileng mabapi le liphephetso tsa thepa tse tobaneng le indasteri ea semiconductor. Li-alloy tsa rona tsa aluminium tsa letoto la 6000 ha se lihlahisoa tse tloaelehileng tsa bokahohleng, empa ke litharollo tsa thepa tse ikhethileng tse entsoeng ka ho khetheha bakeng sa tlhahiso ea semiconductor, tse akaretsang maemo ohle ho tloha likarolong tse nepahetseng ho ea likarolong tsa sebopeho bakeng sa lisebelisoa tse kholo.

Re fana ka lits'ebeletso tsa sebaka se le seng ho kenyeletsoa le puisano ea khetho ea thepa, mechini e etselitsoeng motho ka mong, kalafo ea bokaholimo, le ts'ehetso ea tekheniki ho thusa bareki ba lefats'e ba semiconductor ho khutsufatsa lipotoloho tsa R&D, ho fokotsa litšenyehelo tsa tlhahiso, le ho ntlafatsa tlholisano ea sehlahisoa.Lisebelisoa tsa aluminium tsa 6061/6063kapa di-alloy tse ikgethang tsa semiconductor tsa maemo a hodimo, re ka fana ka tshehetso e tsitsitseng le e tshepahalang ya thepa bakeng sa kgolo ya kgwebo ya hao ka boiphihlelo ba profeshenale.

Ikutloe u lokolohile ho ikopanya le rona neng kapa neng ho buisana ka litlhoko tsa hau tse ikhethileng tsa kopo ea semiconductor, ho nolofalletsa li-alloy tsa aluminium tse sebetsang hantle tsa letoto la 6000 ho sebetsa e le motheo o tiileng bakeng sa boqapi ba hau ba lisebelisoa tsa semiconductor.