Nā te whai tonu a te umanga haurua-waenga i ngā maramara iti ake, tere ake, me te kaha ake, kua panaia ngā tukanga hanga ki ngā taumata tino tika, ā, kāore he wāhi e kaha ake ai tēnei pēhanga i roto i ngā raina horoi haurua-waenga. Ko ēnei pūnaha nui te kawenga mō te tango i ngā poke i te taumata ngota, nā te mea ahakoa he matūriki kotahi te rahi o te maikoroni, he iti rānei te katote konganuku ka taea te whakakore i te maramara 3nm. Mō ngā tau, i whakawhirinaki te umanga ki tētahi whānuitanga whaiti o ngā rauemi, me te whakaaro me patu te mahi i te utu, te taumaha, te roa rānei. Engari ko te konumohe me ōna koranu i hangaia kia tino tika, tae atu ki ngā mea ritengangā pereti konumohe, ngā pae konumohe,me ngā ngongo konumohe, kua puta ake hei huringa nui, he rerekē i ngā tumanakohanga, ā, kua noho hei mea nui i roto i ngā raina horoi mahi teitei. Koinei te kōrero mō te ara ake o te konumohe, mā te miihini matatau me te pūtaiao rauemi, hei tūāpapa mō te hiranga o te hanga haurua-ira.

Kei roto i ngā raina horoi haurua-arahi he whānuitanga o ngā tukanga, mai i te whakairo matū mākū me te horoi ki te horoi plasma maroke, he rerekē ngā tono rauemi o ia mea. Ko ngā paepae mākū, e whakamahi ana i ngā otinga matū kaha hei tango i ngā waikura me ngā poke whakarewa, me whai wāhanga e ātete ana ki te waikura, e whakaiti ana i te maturuturunga matūriki, ā, e tautoko ana i te rere tika o te wai. I tētahi atu taha, e hiahia ana ngā pūnaha horoi plasma korehau ki te hototahi UHV, te pumau wera, me te ātete ki te horo i puta mai i te plasma. Mō ngā tekau tau, nā ēnei whakaritenga i ārahi ngā kaihanga ki te pai ake ki ngā rauemi pēnei i te maitai kore waikura 316L mō ngā tukanga mākū me te kuata mō ngā rūma plasma, ngā kōwhiringa i puta mai me ngā taupatupatu nui. Ko ngā pūnaha whakahaere aunoa taumaha teitei o te maitai kore waikura, i te mea ko tōna kawe wera ngoikore i hua ai ngā pikinga pāmahana i whakaiti i te ōrite o te horoi. Ahakoa te koretake o te matū o te kuata, he pakarukaru, he utu nui hoki, ka nui ake ngā utu whakakapinga i roto i ngā taiao whakaputa nui.

I tīmata te pikinga ake o te konumohe i te mōhiotanga ka taea te whakarei ake i ōna āhuatanga ā-roto, te mama, te kawe wera teitei, me te kaha miihini pai rawa atu mā te hangarau tika kia tutuki ai ngā paerewa taumata haurua-ira, inā koa ka hangaia hei pereti konumohe ritenga, hei pae konumohe, hei ngongo konumohe. Ko te putanga nui i puta mai i roto i ngā tikanga miihini matatau i whakaritea ki ngā āhuatanga ahurei o te konumohe, e āhei ai ngā kaihanga ki te hanga i ngā wāhanga e aro ana ki ngā āhuatanga motuhake o ngā mahi raina horoi. Mā te miihini tika CNC, me te whakamātautau ultra-sound me te mana kounga tino pakari, kua taea ai e te konumohe te whakatutuki i ngā whakaritenga tino kaha o te umanga mō te tika o te rahinga me te whakaotinga mata, ka waiho ā mātou ratonga miihini konumohe hei hoa nui mō ngā kaihanga taputapu haurua-ira.

Ko tētahi o ngā whakamahinga tino nui o te konumohe i roto i ngā raina horoi ko ngā rūma plasma korehau, kei reira te urunga aukume tata-kore o te rauemi ka ārai i te whakapōturitanga o ngā mara plasma RF, he mea nui ki te whakatutuki i te whakairo me te horoi ōrite. Kāore i rite ki te maitai kore waikura, ka taea te whakararuraru i tetohatoha plasma, pereti konumoheMā ngā pakitara rūma ka whakarite kia ōrite te matotoru o te plasma puta noa i te mata o te wafer, ka whakaitihia te rerekētanga o te tukanga me te whakapai ake i te hua. Ko ngā hanganga tautoko pae konumohe kua mīhinihia kia tika te miihini, i hangaia hei tu atu i ngā rerekētanga pēhanga UHV, ka whakarato i te hanganga pumau me te kore e tāpiri i te taumaha nui. Hei tāpiri, ko ngā whāngai korehau ngongo konumohe korekore, kua mīhinihia ki ngā manawanui ±0.003mm, ka pupuri i te pumau o te UHV me te whakahohe i te haere o ngā hau tukanga me ngā tohu hiko. Ko ēnei wāhanga konumohe, i hangaia mai i te koranu 6061-T6 me te miihini CNC korekore, ka tutuki te mahi UHV me ngā reiti turuturu helium i raro i te 10⁻⁹ mbar·L/s, e tutuki ana i ngā paerewa korehau tino pakari mō ngā tukanga semiconductor matatau. Ko ngā mata konumohe kua anodized ka whakarei ake i te mahi mā te whakarato i tētahi arai pakari, ātete ki te waikura e tu atu ana i te roa o te wā e pāngia ana e ngā momo plasma tauhohe pēnei i te hāora me te fluorine.

I roto i ngā pūnaha paepae mākū, kua whakamātauhia te whai hua o ngā wāhanga konumohe i roto i ngā momo tuku wai, ngā kaikawe wafer, me ngā tāke horoi, me ngā ngongo konumohe, ngā pereti konumohe, me ngā pae konumohe hei poutokomanawa mō ēnei pūnaha tino tika. Mā ngā ngongo konumohe kua mīhinihia kia tino tika (3mm~200mm te whānui) me ngā awaawa moroiti e whakarite ana i ngā tere rere matū tika, he mea nui mō te pupuri i ngā kōtaha whakairo ōrite puta noa i ngā wafer 12-inihi. Kāore i rite ki ngā wāhanga kirihou, ka taea te tango i ngā poke, te pirau rānei i roto i te wā, he iti te hau e puta ana i ngā momo ngongo konumohe, ā, he hototahi ki ngā matū horoi paerewa katoa, tae atu ki te 50:1 HF me ngā mea whakairo e hangai ana ki te peroxide. Ko ngā kaikawe wafer pereti konumohe, kua mīhinihia me ngā mokowā tika hei pupuri i ngā wafer kia mau i te wā horoi, he huarahi māmā ki te kowiri tira, e whakaiti ana i te ngenge o te ringa karetao me te whakahohe i ngā wā huringa tere ake. Mā te kawe wera teitei e whakarite kia rite te tohatoha pāmahana i te wā horoi, e whakaiti ana i te piko o te wafer me te whakapai ake i te rerekētanga matotoru katoa (TTV) ki raro iho i te 5%, he inenga matua mō te tukatuka wafer matatau. Hei tāpiri, ko ngā reera arataki pae konumohe, kua whakauruhia ki roto i ngā pūnaha kawe paepae mākū, e whakarato ana i te nekehanga maeneene, kore-waku o ngā kaikawe wafer, e whakaiti ana i te whakaputanga matūriki me te whakapai ake i te pono o te tukanga.

Ko ngā painga o te mahi a te konumohe e tautokona ana e ngā raraunga pakari. I roto i tētahi rangahau tata nei nā tētahi kaihanga taputapu haurua-ārahi matua i whakarite i ngā wāhanga konumohe me te kowiri tira i roto i tētahi raina horoi paepae mākū nui, me te arotahi ki te pānga o ngā ngongo konumohe, ngā pereti konumohe, me te miihini tika. He mea whakamiharo ngā hua: i whakaitihia e ngā manifold ngongo konumohe te whakamahinga matū mā te 12% nā te pai ake o te whakahaere rere, i te mea i whakaitihia e ngā kawe wafer pereti konumohe te wā whakahaere mā te 18% nā te mama ake o te taumaha. Ko te mea nui, i eke te raina konumohe-whakauru ki te reiti hua teitei ake o te 6.5% mō ngā wafer 5nm, i akiakihia e te pai ake o te ōritetanga horoi me te whakaiti i te poke o ngā matūriki. I puta mai i ēnei whakapainga he penapena utu ā-tau neke atu i te $2 miriona mō te fab, he ROI whakamīharo mō ngā whakapainga konumohe.

Ko tētahi atu wāhanga e tino pai ai te konumohe ko te whakahaere wera, he wero nui i roto i ngā raina horoi i reira ka puta te wera mai i ngā tauhohenga matū werawera me ngā tukanga plasma. Ko te kawe wera o te konumohe (≈150 W/m·K) e toru ngā wā neke atu i te kowiri tira, e āhei ai te tohatoha wera me te whakahaere pāmahana pai. Ko ngā pereti whakamatao pereti konumohe kua hangaia kia tika te mīhini, kua whakauruhia ki roto i ngā kaukau pae maku me ngā rūma plasma, ka pupuri i te pumau o te pāmahana i roto i te ±0.5°C, e whakarite ana i te mahi horoi tonu ahakoa i roto i ngā oma whakaputa roa. Ko ngā whakawhiti wera pae konumohe, kua honoa ki ngā raina whakamatao ngongo konumohe, ka tere te whakawhiti i te wera mai i ngā wāhanga nui, ka ārai i te wera nui me te whakaroa i te roa o te ora o ngā taputapu. He tino whai hua tēnei pumau wera i roto i ngā tukanga matatau pēnei i te horoi RCA, he mea nui te whakahaere pāmahana tika mō te tango i ngā toenga rauropi me ngā poke whakarewa me te kore e kino te mata o te papa.

Ko te āheinga miihini o te konumohe tētahi atu painga matua, e āhei ai te whakaputa i ngā wāhanga uaua, ritenga e arotau ana i te mahi horoi raina, he āheinga e whakatakoto ana i tā mātouratonga miihini konumohe wehe. Kāore i rite ki te kowiri tira, e hiahia ana ki ngā taputapu motuhake me ngā wā miihini roa ake, ka taea te miihini tika i te konumohe ki ngā āhua uaua me ngā manawanui kikī (±0.005mm) i te utu iti iho. Mā tēnei ngāwari ka taea e ngā kaihanga taputapu te hoahoa i ngā raina horoi he kiato ake, he whai hua ake, ā, he mea whakarite ki ngā whakaritenga tukanga motuhake. Hei tauira, ka whakamahia ngā kōtaha pae konumohe kua whakaputahia kia tika i roto i ngā anga raina horoi me ngā āputa, e whakarato ana i te pakari o te hanganga me te whakaiti i te taumaha taputapu katoa tae atu ki te 30%. Ehara i te mea ka whakaiti noa i ngā utu tāutanga engari ka māmā ake hoki te whirihora anō i ngā raina mō ngā tukanga hou - he kaha nui i roto i te ahumahi e tere haere ana te whanaketanga o te hangarau. Hei tāpiri, ko ngā ārai pereti konumohe, he mea miihini ki ngā tauira kōhao ritenga, ka arotau i te rere o te hau i roto i ngā rūma plasma, ka whakapai ake i te ōrite o te horoi.

Ko ngā painga o te konumohe mō te oranga tonutanga ka whakakaha ake i tōna tūnga i roto i te hangahanga haurua-ira, ina hoki kei te piki haere te hiranga o te kawenga mō te taiao. Ka taea te hangarua 100% te konumohe, kāore e ngaro te kounga, ka whakaiti i te tapuwae waro o ngā pereti konumohe, te pae konumohe, me ngā wāhanga ngongo konumohe. Ko ōna hiahia pūngao iti mō te miihini me te kawe ka whai wāhi atu ki ngā mahi matomato, e hangai ana ki te whāinga a te umanga ki te whakaiti i te pānga ki te taiao. Mō ngā kamupene hanga e whai ana ki te whakatutuki i ngā whāinga oranga tonutanga me te pupuri tonu i te mahi, he painga mārama te konumohe i ngā rauemi tuku iho.

I te ahu whakamua o ngā tukanga haurua-ira ki te 2nm me tua atu, ka piki ake ngā tono mō ngā raina horoi, ā, kei te pai te tūnga o te konumohe ki te whakatutuki i ēnei wero. Ko ngā mahi auaha tonu i roto i te whanaketanga o te koranu konumohe, pērā i te whakaurunga o ngā koranu 5083 me te 7075 parakore teitei, kei te whakarei ake i te kaha me te ātete ki te waikura o te rauemi, me te whakawhānui ake i ōna tono ahakoa i roto i ngā tukanga horoi tino uaua. Ko ngā tikanga miihini matatau, tae atu ki te miihini taiaho me te miihini tuku hiko (EDM), kei te pana atu i ngā rohe o ngā mea ka taea me te konumohe, ka taea ai ngā wāhanga me ngā manawanui kaha ake me ngā āhuahanga uaua ake.

Mai i te mea kāore i te tino whakaarohia hei wāhanga tino nui, ko te pikinga ake o ngā raina horoi haurua-haurua o te konumohe he tohu i te mana o te hangarau tika me te pūtaiao rauemi. Mā te whakamahi i ngā kaha ā-roto o te konumohe me te whakarei ake i a rātou mā te miihini matatau o ngā pereti konumohe, ngā pae konumohe, me ngā ngongo konumohe, kua kitea e te umanga haurua-haurua he rauemi e tuku ana i te mahi tino pai, ngā utu iti, me te pumau ake, he mea nui katoa i roto i te mākete tino whakataetae. I te mea he maha atu ngā kamupene hanga e mōhio ana ki ngā painga o te konumohe, ka tipu tonu tana mahi i roto i ngā raina horoi, ka akiaki i te auahatanga me te whakahohe i te whakatupuranga e whai ake nei.te whakatinanatangaofhangarau haurua-ira. He mama, he tika, he whai hua hoki te heke mai o te horoi haurua-ira, ā, he mea hanga ki te konumohe.