Ukuphishekela okungapheli kwemboni ye-semiconductor ama-chip amancane, asheshayo, futhi anamandla kakhulu kuye kwasunduza izinqubo zokukhiqiza emazingeni angakaze abonwe okunemba, futhi akukho ndawo lapho lokhu kucindezela kunamandla khona kunasemigqeni yokuhlanza ye-semiconductor. Lezi zinhlelo ezibalulekile zinomthwalo wokususa ukungcola ezingeni le-athomu, njengoba ngisho ne-ion eyodwa ye-micron noma i-ion yensimbi eqondile ingenza i-chip engu-3nm ingasebenzi. Sekuyiminyaka eminingi, imboni ithembele ezintweni zokwakha ezincane, icabanga ukuthi ukusebenza kwakudinga ukudela izindleko, isisindo, noma ukuqina. Kodwa i-aluminium enziwe ngokunemba kanye nama-alloy ayo, kufaka phakathi okwenziwe ngokwezifiso.amapuleti e-aluminium, imigoqo ye-aluminium,kanye namashubhu e-aluminium, avele njengoshintsho olukhulu, ephula okulindelwe futhi aba yinto ebalulekile emigqeni yokuhlanza esebenza kahle kakhulu. Lena indaba yokuthi i-aluminium, ngokusebenzisa imishini ethuthukisiwe kanye nesayensi yezinto ezibonakalayo, ikhule kanjani yaba yitshe lesisekelo lobuciko bokukhiqiza ama-semiconductor.

Imigqa yokuhlanza ye-semiconductor ihlanganisa izinqubo ezahlukahlukene, kusukela ekuqopheni nasekuhlanzeni ngamakhemikhali amanzi kuya ekuhlanzeni nge-plasma eyomile, ngayinye inezidingo zezinto ezihlukile. Amabhentshi amanzi, asebenzisa izixazululo zamakhemikhali ezinamandla ukususa ama-oxide kanye nokungcola kwensimbi, adinga izingxenye ezimelana nokugqwala, zinciphise ukuchitheka kwezinhlayiya, futhi zisekele ukugeleza koketshezi okuqondile. Ngakolunye uhlangothi, izinhlelo zokuhlanza i-vacuum plasma zifuna ukuhambisana kwe-UHV, ukuzinza kokushisa, kanye nokumelana nokuguguleka okubangelwa yi-plasma. Sekungamashumi eminyaka, lezi zidingo zenze abakhiqizi bathande izinto ezifana nensimbi engagqwali engu-316L yezinqubo ezimanzi kanye ne-quartz yamakamelo e-plasma, izinketho eza nokushintshana okukhulu. Izinhlelo zokuphatha ezenzakalelayo zensimbi engagqwali ezicindezelwe isisindo esikhulu, kuyilapho ukuhanjiswa kwayo kokushisa okungekuhle kubangele amazinga okushisa anciphise ukufana kokuhlanza. I-Quartz, yize ingasebenzisi amakhemikhali, iyaphuka futhi iyabiza, okuholela ezindleleni eziphezulu zokufaka esikhundleni ezindaweni zokukhiqiza ezinomthamo omkhulu.

Ukwanda kwe-aluminium kwaqala ngokuqaphela ukuthi izakhiwo zayo ezingokwemvelo, ukungabi lula, ukuhanjiswa kokushisa okuphezulu, kanye nokusebenza kahle kakhulu kwemishini kungathuthukiswa ngobunjiniyela bokunemba ukuze kuhlangatshezwane nezindinganiso zezinga le-semiconductor, ikakhulukazi uma kwenziwe ngamapuleti e-aluminium enziwe ngokwezifiso, imigoqo ye-aluminium, namashubhu e-aluminium. Intuthuko ebalulekile ifike kumasu okusebenza athuthukisiwe aklanyelwe izici ezihlukile ze-aluminium, okuvumela abakhiqizi ukudala izingxenye ezibhekana nezindawo ezithile zobuhlungu zokusebenza kwemigqa yokuhlanza. Ukusebenza kwe-CNC ngokunemba, kuhlanganiswe nokuhlolwa kwe-ultra-sonic kanye nokulawulwa kwekhwalithi okuqinile, kuye kwenza i-aluminium yakwazi ukuhlangabezana nezidingo eziqinile kakhulu embonini zokunemba kobukhulu kanye nokuqedwa kwendawo, okwenza izinsizakalo zethu zokusebenzisa i-aluminium zibe ngumlingani obalulekile wabenzi bemishini ye-semiconductor.

Enye yezindlela ezibaluleke kakhulu zokusebenzisa i-aluminium emigqeni yokuhlanza isemakamelweni e-vacuum plasma, lapho ukungena kwamandla kagesi kwezinto ezisetshenziswayo kuvimbela ukuphambuka kwamasimu e-RF plasma, okuyisici esibalulekile ekufezeni ukugqwala nokuhlanza okufanayo. Ngokungafani nensimbi engagqwali, engaphazamisaukusatshalaliswa kwe-plasma, ipuleti le-aluminiumIzindonga zegumbi ziqinisekisa ubuningi be-plasma obuhambisanayo kulo lonke ubuso be-wafer, kunciphisa ukushintshashintsha kwenqubo kanye nokuthuthukisa isivuno. Izakhiwo zokusekela ibha ye-aluminium ezisebenza ngomshini oqondile, ezenzelwe ukumelana nokwehluka kwengcindezi ye-UHV, zinikeza ubuqotho besakhiwo ngaphandle kokwengeza isisindo esiningi. Ngaphezu kwalokho, ukuphakelwa kwe-vacuum yeshubhu ye-aluminium engenamthungo, okwenziwe ngomshini okufika ku-±0.003mm ukubekezelelana, kugcina ubuqotho be-UHV ngenkathi kuvumela ukudlula kwamagesi enqubo kanye nezibonakaliso zikagesi. Lezi zingxenye ze-aluminium, ezenziwe nge-alloy engu-6061-T6 enemishini ye-CNC engenamthungo, zithola ukusebenza kwe-UHV ngamazinga okuvuza kwe-helium angaphansi kuka-10⁻⁹ mbar·L/s, zihlangabezana nezindinganiso ze-vacuum eziqinile zezinqubo ze-semiconductor ezithuthukisiwe. Izindawo ze-aluminium ezi-anodized zithuthukisa ukusebenza ngokuhlinzeka ngesithiyo esiqinile, esingamelani nokugqwala esimelana nokuchayeka isikhathi eside ezinhlotsheni ze-plasma ezisebenzayo njenge-oxygen ne-fluorine.

Ezinhlelweni zebhentshi ezimanzi, izingxenye ze-aluminium zibonakalise ukubaluleka kwazo kuma-manifold okulethwa koketshezi, izithwali ze-wafer, kanye namathangi okuhlanza, ngamashubhu e-aluminium, amapuleti e-aluminium, kanye nemigoqo ye-aluminium eyakha umgogodla walezi zinhlelo zokunemba okuphezulu. Amashubhu e-aluminium akhiwe ngomshini oqondile (ububanzi obungu-3mm ~ 200mm) aneziteshi ezincane ze-orifice aqinisekisa amazinga okugeleza kwamakhemikhali aqondile, abalulekile ekugcineni amaphrofayili okuqopha ahambisanayo kuma-wafer angama-intshi angu-12. Ngokungafani nezingxenye zepulasitiki, ezingakhipha ukungcola noma zonakale ngokuhamba kwesikhathi, ama-manifold eshubhu le-aluminium aphansi futhi ahambisana nawo wonke amakhemikhali okuhlanza ajwayelekile, kufaka phakathi ama-etchants angu-50:1 HF kanye ne-peroxide-based. Izithwali ze-wafer zepuleti le-aluminium, ezifakwe ngomshini onezikhala zokunemba zokubamba ama-wafer ngokuphephile ngesikhathi sokuhlanza, zinikeza enye indlela elula kunensimbi engagqwali, zinciphisa ukukhathala kwengalo yerobhothi futhi zivumela izikhathi zomjikelezo ezisheshayo. Ukushisa kwazo okuphezulu kuqinisekisa ukusatshalaliswa kokushisa okufanayo ngesikhathi sokuhlanza, kunciphisa i-wafer warpage kanye nokuthuthukisa ukuhlukahluka kobukhulu obuphelele (TTV) kube ngaphansi kuka-5%, okuyisilinganiso esibalulekile sokucubungula i-wafer okuthuthukisiwe. Ngaphezu kwalokho, izinsimbi zokuqondisa ibha ye-aluminium, ezihlanganiswe nezinhlelo zokuthutha zebhentshi elimanzi, zinikeza ukunyakaza okubushelelezi, okungenakuphikiswana kwezithwali ze-wafer, kunciphisa ukukhiqizwa kwezinhlayiya futhi kuthuthukise ukuthembeka kwenqubo.

Izinzuzo zokusebenza kwe-aluminium zisekelwa idatha eqinile. Ucwaningo lwamuva olwenziwe ngumkhiqizi wemishini ye-semiconductor ohamba phambili luqhathanise izingxenye ze-aluminium nensimbi engagqwali emgqeni wokuhlanza webhentshi elimanzi elinomthamo omkhulu, lugxile emthonjeni wamashubhu e-aluminium, amapuleti e-aluminium, kanye nomshini wokulungisa ngokunemba. Imiphumela yayimangalisa: ama-manifold e-aluminium tube anciphise ukusetshenziswa kwamakhemikhali ngo-12% ngenxa yokulawulwa kokugeleza okuthuthukisiwe, kuyilapho izithwali ze-aluminium plate wafer zinciphisa isikhathi sokuphatha ngo-18% ngenxa yesisindo sazo esilula. Okubaluleke kakhulu, umugqa ofakwe i-aluminium uthole izinga lokuvunwa eliphakeme ngo-6.5% lama-wafer angu-5nm, okuqhutshwa ukufana kokuhlanza okuthuthukisiwe kanye nokuncipha kokungcola kwezinhlayiya. Lokhu kuthuthukiswa kuhunyushwe ekongeni izindleko okulinganiselwa ngonyaka okungaphezu kwamaRandi ayizigidi ezimbili ngefektri, okuyi-ROI ekhangayo yokuthuthukiswa kwe-aluminium.

Enye indawo lapho i-aluminium iphumelela khona ekuphathweni kokushisa, inselele ebalulekile emigqeni yokuhlanza lapho ukusabela kwamakhemikhali e-exothermic kanye nezinqubo ze-plasma kukhiqiza ukushisa. Ukuqhuba ukushisa kwe-aluminium (≈150 W/m·K) kungaphezu kokuphindwe kathathu kunensimbi engagqwali, okuvumela ukushabalaliswa kokushisa okuphumelelayo nokulawulwa kokushisa. Amapuleti okupholisa epuleti le-aluminium akhiwe ngomshini oqondile, ahlanganiswe ezindlini zokugeza ezimanzi kanye namakamelo e-plasma, agcina ukuqina kokushisa ngaphakathi kuka-±0.5°C, okuqinisekisa ukusebenza kokuhlanza okuqhubekayo ngisho nangesikhathi sokukhiqiza isikhathi eside. Ama-heat exchanger e-aluminium bar, ahlanganiswe nemigqa yokupholisa yeshubhu le-aluminium, adlulisa ukushisa ngokushesha kude nezingxenye ezibalulekile, avimbele ukushisa ngokweqile futhi andise isikhathi sokuphila kwemishini. Lokhu kuzinza kokushisa kubaluleke kakhulu ezinqubweni ezithuthukile njengokuhlanza kwe-RCA, lapho ukulawula ukushisa okunembile kubalulekile ekususeni izinsalela zezinto eziphilayo kanye nokungcola kwensimbi ngaphandle kokulimaza ubuso be-wafer.

Ukukwazi ukusebenza kwe-aluminium kungenye inzuzo ebalulekile, okuvumela ukukhiqizwa kwezingxenye eziyinkimbinkimbi, ezenziwe ngokwezifiso ezithuthukisa ukusebenza kahle kwemigqa yokuhlanza, ikhono elibeka isisekelo sethuizinsizakalo zomshini we-aluminium ezihlukileNgokungafani nensimbi engagqwali, edinga amathuluzi akhethekile kanye nezikhathi zomshini ezinde, i-aluminium ingashintshwa ngokunemba ibe yizimo eziyinkimbinkimbi ngokubekezelelana okuqinile (± 0.005mm) ngentengo encane kakhulu. Lokhu kuguquguquka kuvumela abakhiqizi bemishini ukuthi baklame imigqa yokuhlanza emincane kakhulu, esebenza kahle, futhi elungiselelwe izidingo ezithile zenqubo. Isibonelo, amaphrofayili ebha ye-aluminium ekhishwe ngokunemba asetshenziswa kumafreyimu emigqa yokuhlanza kanye nezindawo zokuvala, enikeza ukuqina kwesakhiwo ngenkathi kunciphisa isisindo semishini iyonke ngamaphesenti angama-30%. Lokhu akugcini nje ngokwehlisa izindleko zokufaka kodwa futhi kwenza kube lula ukulungisa kabusha imigqa yenqubo entsha, ikhono elibalulekile embonini lapho ubuchwepheshe bushintsha ngokushesha. Ngaphezu kwalokho, ama-baffle epuleti le-aluminium, ashintshwa ngamaphethini emigodi yangokwezifiso, enza ngcono ukugeleza kwegesi emakamelweni e-plasma, athuthukise ukufana kokuhlanza.

Izinzuzo zokusimama kwe-aluminium ziqinisa kakhulu isimo sayo ekukhiqizweni kwe-semiconductor, lapho umthwalo wemfanelo wezemvelo uba yinto ebaluleke kakhulu. I-aluminium ingasetshenziswa kabusha ngo-100% ngaphandle kokulahlekelwa yikhwalithi, okunciphisa umthelela wekhabhoni wepuleti le-aluminium, ibha ye-aluminium, kanye nezingxenye zeshubhu le-aluminium. Izidingo zayo zamandla aphansi zomshini wokuthunga kanye nokuthutha nazo zinegalelo ekusebenzeni okuluhlaza, okuhambisana nomgomo wemboni wokunciphisa umthelela wemvelo. Kwabakhi befeshini abafuna ukuhlangabezana nezinhloso zokusimama ngenkathi begcina ukusebenza, i-aluminium inikeza inzuzo ecacile ngaphezu kwezinto zendabuko.

Njengoba izinqubo ze-semiconductor ziqhubekela phambili ku-2nm nangaphezulu, izidingo zemigqa yokuhlanza zizokhula kuphela futhi i-aluminium isesimweni esihle sokubhekana nalezi zinselele. Ukusungulwa okuqhubekayo kwe-aluminium alloy, njengokwethulwa kwe-5083 kanye ne-7075 alloys emsulwa kakhulu, kuthuthukisa amandla ezinto kanye nokumelana nokugqwala, kwandise ukusetshenziswa kwazo ngisho nasezinqubweni zokuhlanza ezidinga kakhulu. Amasu okusebenza athuthukisiwe, okuhlanganisa ukusebenza kwe-laser kanye nokusebenza kwe-electric discharge machining (EDM), aqhubeka nokucindezela imingcele yalokho okungenzeka nge-aluminium, okwenza izingxenye zibe nokubekezelelana okuqinile kanye ne-geometries eyinkimbinkimbi kakhulu.

Kusukela kokunye okungabhekwa njengokungabalulekile, ukukhuphuka kwe-aluminium emigqeni yokuhlanza ye-semiconductor kuwubufakazi bamandla obunjiniyela obunembile kanye nesayensi yezinto ezibonakalayo. Ngokusebenzisa amandla angokwemvelo e-aluminium kanye nokuwathuthukisa ngokusebenzisa imishini ethuthukisiwe yamapuleti e-aluminium, imigoqo ye-aluminium, namashubhu e-aluminium, imboni ye-semiconductor ithole izinto ezinikeza ukusebenza okuphezulu, izindleko eziphansi, kanye nokuzinza okukhulu, zonke izici ezibalulekile emakethe encintisana kakhulu. Njengoba izinto ezintsha eziningi ziqaphela izinzuzo ze-aluminium, indima yayo emigqeni yokuhlanza izoqhubeka nokukhula, iqhube ukusungula izinto ezintsha futhi ivumele isizukulwane esilandelayo.ukuhlanganiswaofubuchwepheshe be-semiconductor. Ikusasa lokuhlanza i-semiconductor lilula, linembile, futhi lisebenza kahle, futhi lakhiwe nge-aluminium.