Ho phehella ho sa khaotseng ha indasteri ea semiconductor ho fumana li-chip tse nyane, tse potlakileng le tse matla haholoanyane ho sutumelletse lits'ebetso tsa tlhahiso maemong a sa tloaelehang a ho nepahala, 'me ha ho kae kapa kae moo khatello ena e leng matla ho feta meleng ea ho hloekisa ea semiconductor. Litsamaiso tsena tsa bohlokoa li ikarabella bakeng sa ho tlosa litšila boemong ba athomo, kaha esita le karoloana e le 'ngoe ea micron kapa ion ea tšepe e ka etsang hore chip ea 3nm e se ke ea sebetsa. Ka lilemo tse ngata, indasteri e ne e itšetlehile ka mefuta e menyenyane ea thepa, ho nahanoa hore ts'ebetso e hloka ho tela litšenyehelo, boima, kapa ho tšoarella. Empa aluminium e entsoeng ka mokhoa o nepahetseng le li-alloy tsa eona, ho kenyeletsoa le tse ikhethileng.lipoleiti tsa aluminium, mekoallo ea aluminium,le lipeipi tsa aluminium, li hlahile e le phetoho e kholo, li phephetsa litebello 'me li fetohile tsa bohlokoa haholo meleng ea ho hloekisa e sebetsang hantle. Ena ke pale ea kamoo aluminium, ka machining e tsoetseng pele le saense ea thepa, e ileng ea fetoha lejoe la motheo la bokhabane ba tlhahiso ea semiconductor.

Methapo ea ho hloekisa ea semiconductor e akaretsa mekhoa e fapaneng, ho tloha ho etching le ho hlatsoa ka lik'hemik'hale tse metsi ho ea ho hloekisoeng ha plasma e omileng, e 'ngoe le e 'ngoe e na le litlhoko tse ikhethang tsa thepa. Libenche tse metsi, tse sebelisang litharollo tse matla tsa lik'hemik'hale ho tlosa li-oxide le litšila tsa tšepe, li hloka likarolo tse hanelang ho bola, li fokotsa ho tšoloha ha likaroloana, le ho tšehetsa phallo e nepahetseng ea mokelikeli. Ka lehlakoreng le leng, litsamaiso tsa ho hloekisa plasma ka vacuum li hloka ho lumellana ha UHV, botsitso ba mocheso, le ho hanyetsa khoholeho e bakoang ke plasma. Ka mashome a lilemo, litlhoko tsena li ile tsa etsa hore bahlahisi ba rate thepa e kang tšepe e sa hloekang ea 316L bakeng sa mekhoa e metsi le quartz bakeng sa likamore tsa plasma, likhetho tse tlileng le liphetoho tse kholo. Litsamaiso tsa ho sebetsana le tšepe e sa hloekang li ile tsa hatella boima ba eona bo phahameng, ha tsamaiso ea eona e fokolang ea mocheso e bakile maemo a mocheso a fokolitseng ho tšoana ha ho hloekisa. Quartz, leha e sa sebetse ka lik'hemik'hale, e fokola ebile e theko e boima, e lebisang litšenyehelong tse phahameng tsa ho nkela sebaka libakeng tse ngata tsa tlhahiso.

Ho phahama ha aluminium ho qalile ka ho lemoha hore thepa ea eona ea tlhaho, bobebe, ho tsamaisa mocheso o phahameng, le bokhoni bo botle ba ho sebetsa ka mechine li ka ntlafatsoa ka boenjiniere ba ho nepahala ho fihlela maemo a maemo a semiconductor, haholo-holo ha li etsoa ka lipoleiti tsa aluminium tse ikhethileng, li-bars tsa aluminium le li-tubes tsa aluminium. Katleho ea bohlokoa e tlile ka mekhoa e tsoetseng pele ea ho sebetsa ka mechine e etselitsoeng litšobotsi tse ikhethang tsa aluminium, e lumellang bahlahisi ho theha likarolo tse sebetsanang le lintlha tse ikhethang tsa bohloko ba ts'ebetso ea mohala oa ho hloekisa. Ho sebetsa ka mokhoa o nepahetseng oa CNC, hammoho le tlhahlobo ea ultra-sonic le taolo e tiileng ea boleng, ho nolofalelitse aluminium ho fihlela litlhoko tse thata ka ho fetisisa tsa indasteri bakeng sa ho nepahala ha boholo le ho qeta bokaholimo, e leng se etsang hore litšebeletso tsa rona tsa ho sebetsa ka aluminium e be molekane oa bohlokoa bakeng sa baetsi ba lisebelisoa tsa semiconductor.

E 'ngoe ea lits'ebetso tsa bohlokoa ka ho fetisisa tsa aluminium meleng ea ho hloekisa ke likamoreng tsa plasma tse se nang letho, moo ho kenella ha makenete ha thepa ho batlang ho se na letho ho thibelang ho sotha masimo a plasma a RF, e leng ntlha ea bohlokoa ho fihlelleng ho hlaba le ho hloekisa ka mokhoa o ts'oanang. Ho fapana le tšepe e sa hloekang, e ka sitisangkabo ea plasma, poleiti ea aluminiumMabota a kamore a netefatsa hore plasma e tsitsitse ho pholletsa le bokaholimo ba wafer, a fokotsa phapang ea ts'ebetso le ho ntlafatsa chai. Meaho ea tšehetso ea aluminium bar e entsoeng ka mochini o nepahetseng, e etselitsoeng ho mamella phapang ea khatello ea UHV, e fana ka botšepehi ba sebopeho ntle le ho eketsa boima bo feteletseng. Ho feta moo, li-feedthroughs tsa vacuum tsa tube ea aluminium e se nang sekoli, tse entsoeng ka mechini ho fihlela ho ±0.003mm tolerances, li boloka botšepehi ba UHV ha li ntse li nolofalletsa ho feta ha likhase tsa ts'ebetso le matšoao a motlakase. Likarolo tsena tsa aluminium, tse entsoeng ka motsoako oa 6061-T6 ka mochini o se nang sekoli oa CNC, li fihlella ts'ebetso ea UHV ka sekhahla sa ho lutla ha helium ka tlase ho 10⁻⁹ mbar·L/s, li fihlela litekanyetso tse thata ka ho fetisisa tsa vacuum bakeng sa lits'ebetso tse tsoetseng pele tsa semiconductor. Libaka tsa aluminium tse nang le anodized li ntlafatsa ts'ebetso ka ho fana ka thibelo e thata, e sa senyeheng mafome e mamellang ho pepesehela mefuta ea plasma e arabelang nako e telele joalo ka oksijene le fluorine.

Litsamaisong tsa benche e metsi, likarolo tsa aluminium li ipakile e le tsa bohlokoa ka har'a li-manifold tsa ho tlisa metsi, li-wafer carriers, le litanka tsa ho hlatsoa, ​​​​ka li-tube tsa aluminium, lipoleiti tsa aluminium, le li-bars tsa aluminium tse etsang mokokotlo oa litsamaiso tsena tse nepahetseng haholo. Li-tube tsa aluminium tse entsoeng ka mochini o nepahetseng (bophara ba 3mm ~ 200mm) tse nang le likanale tsa micro-orifice li netefatsa sekhahla se nepahetseng sa phallo ea lik'hemik'hale, tsa bohlokoa bakeng sa ho boloka liprofaele tse tsitsitseng tsa ho betla ho pholletsa le li-wafer tsa lisenthimithara tse 12. Ho fapana le likarolo tsa polasetiki, tse ka ntšang litšila kapa tsa senyeha ha nako e ntse e ea, li-manifold tsa tube ea aluminium ha li na khase 'me li lumellana le lik'hemik'hale tsohle tse tloaelehileng tsa ho hloekisa, ho kenyeletsoa le li-etchants tse thehiloeng ho peroxide tse 50:1. Li-wafer tsa poleiti ea aluminium, tse entsoeng ka li-slots tse nepahetseng ho tšoara li-wafers ka mokhoa o sireletsehileng nakong ea ho hloekisa, li fana ka mokhoa o bobebe ho feta tšepe e sa hloekang, li fokotsa mokhathala oa letsoho la roboto le ho nolofalletsa linako tse potlakileng tsa potoloho. Ho khanna ha tsona mocheso o phahameng ho netefatsa kabo e tšoanang ea mocheso nakong ea ho hloekisa, ho fokotsa warpage ea wafer le ho ntlafatsa phapang ea botenya bohle (TTV) ho fihlela ka tlase ho 5%, e leng tekanyo ea bohlokoa bakeng sa ts'ebetso e tsoetseng pele ea wafer. Ho phaella moo, lireile tsa tataiso ea li-bar tsa aluminium, tse kopantsoeng le litsamaiso tsa lipalangoang tsa benche e metsi, li fana ka motsamao o boreleli, o se nang khohlano oa lijari tsa wafer, li fokotsa tlhahiso ea likaroloana le ho ntlafatsa ts'epo ea ts'ebetso.

Melemo ea ts'ebetso ea aluminium e tšehetsoa ke data e thata. Phuputso ea morao tjena e entsoeng ke moetsi ea ka sehloohong oa lisebelisoa tsa semiconductor e bapisitse likarolo tsa aluminium le tšepe e sa hloekang moleng o phahameng oa ho hloekisa benche e metsi, e shebaneng le tšusumetso ea lipeipi tsa aluminium, lipoleiti tsa aluminium, le mochini o nepahetseng. Liphetho li bile tse makatsang: li-manifold tsa tube ea aluminium li fokolitse tšebeliso ea lik'hemik'hale ka 12% ka lebaka la taolo e ntlafalitsoeng ea phallo, ha li-carrier tsa wafer tsa poleiti ea aluminium li fokolitse nako ea ho sebetsana ka 18% ka lebaka la boima ba tsona bo bobebe. Habohlokoa le ho feta, mohala o nang le aluminium o fihletse sekhahla se phahameng sa chai sa 6.5% bakeng sa li-wafer tsa 5nm, tse susumetsoang ke ho tšoana ho ntlafalitsoeng ha ho hloekisa le ho fokotseha ha tšilafalo ea likaroloana. Lintlafatso tsena li fetoletsoe ho poloko ea litšenyehelo tse hakanyetsoang selemo le selemo ea ho feta $2 milione bakeng sa thepa, e leng ROI e qobellang bakeng sa ntlafatso ea aluminium.

Sebaka se seng seo aluminium e ipabolang ho sona ke taolong ya mocheso, phephetso e kgolo meleng ya ho hlwekisa moo dikarabelo tsa dikhemikhale tsa exothermic le ditshebetso tsa plasma di hlahisang mocheso. Ho tsamaisa mocheso ha aluminium (≈150 W/m·K) ho feta makgetlo a mararo ho feta tshepe e sa ruseng, e leng se dumellang ho qhala mocheso ka katleho le taolo ya mocheso. Dipoleiti tsa ho phodisa poleiti ya aluminium tse entsweng ka nepo, tse kentsweng dibateng tse metsi tsa benche le dikamoreng tsa plasma, di boloka botsitso ba mocheso ka hare ho ±0.5°C, di netefatsa tshebetso e tsitsitseng ya ho hlwekisa esita le nakong ya nako e telele ya tlhahiso. Di-exchange tsa mocheso tsa aluminium bar, tse kopantsweng le mela ya coolant ya tube ya aluminium, di fetisetsa mocheso ka potlako hole le dikarolo tsa bohlokwa, di thibela ho chesa haholo le ho eketsa nako ya bophelo ba disebediswa. Ho tsitsa hona ha mocheso ho bohlokwa haholo ditshebetsong tse tswetseng pele jwalo ka ho hlwekisa RCA, moo taolo e nepahetseng ya mocheso e leng ya bohlokwa bakeng sa ho tlosa masalla a tlhaho le ditshila tsa tshepe ntle le ho senya bokahodimo ba wafer.

Ho sebetsa ha aluminium hantle ke molemo o mong oa bohlokoa, o nolofalletsang tlhahiso ea likarolo tse rarahaneng, tse ikhethileng tse ntlafatsang ts'ebetso ea mohala oa ho hloekisa, bokhoni bo behanglitšebeletso tsa ho sebetsa ka aluminium. Ho fapana le tšepe e sa ruseng, e hlokang lisebelisoa tse khethehileng le linako tse telele tsa ho sebetsa, aluminium e ka etsoa ka mokhoa o nepahetseng hore e be libopeho tse rarahaneng ka mamello e tiileng (± 0.005mm) ka karoloana ea litšenyehelo. Ho tenyetseha hona ho lumella baetsi ba lisebelisoa ho rala mela ea ho hloekisa e nyane haholoanyane, e sebetsang hantle, le e etselitsoeng litlhoko tse itseng tsa ts'ebetso. Mohlala, liprofaele tsa aluminium tse nkiloeng ka nepo li sebelisoa liforeiming le li-enclosure tsa mela ea ho hloekisa, li fana ka ho tiea ha sebopeho ha li ntse li fokotsa boima ba lisebelisoa ka kakaretso ho fihlela ho 30%. Sena ha se fokotse litšenyehelo tsa ho kenya feela empa hape se etsa hore ho be bonolo ho hlophisa mela hape bakeng sa ts'ebetso e ncha, bokhoni ba bohlokoa indastering moo theknoloji e fetohang ka potlako. Ho feta moo, li-baffle tsa poleiti ea aluminium, tse entsoeng ka mekhoa ea masoba a ikhethileng, li ntlafatsa phallo ea khase likamoreng tsa plasma, li ntlafatsa ho tšoana ha ho hloekisa.

Melemo ea botsitso ba aluminium e matlafatsa boemo ba eona tlhahisong ea semiconductor, moo boikarabello ba tikoloho bo ntseng bo e-ba ntlha ea bohlokoa haholo. Aluminium e ka sebelisoa hape ka 100% ntle le tahlehelo ea boleng, e leng se fokotsang khabone ea poleiti ea aluminium, bar ea aluminium le likarolo tsa tube ea aluminium. Litlhoko tsa eona tse tlase tsa matla bakeng sa ho sebetsa le ho tsamaisa le tsona li kenya letsoho ts'ebetsong e tala, e lumellanang le sepheo sa indasteri sa ho fokotsa tšusumetso ea tikoloho. Bakeng sa masela a batlang ho fihlela lipheo tsa botsitso ha ba ntse ba boloka ts'ebetso, aluminium e fana ka monyetla o hlakileng ho feta lisebelisoa tsa setso.

Ha lits'ebetso tsa semiconductor li ntse li tsoela pele ho fihla ho 2nm le ho feta, litlhoko tsa meleng ea ho hloekisa li tla eketseha feela 'me aluminium e boemong bo botle ba ho tobana le liphephetso tsena. Mekhoa e mecha ea ntlafatso ea alloy ea aluminium, joalo ka ho hlahisoa ha li-alloy tsa 5083 le 7075 tse hloekileng haholo, e ntlafatsa matla a thepa le ho hanyetsa mafome, e atolosa lits'ebetso tsa eona esita le lits'ebetsong tse thata ka ho fetisisa tsa ho hloekisa. Mekhoa e tsoetseng pele ea ho sebetsa, ho kenyeletsoa le ho sebetsa ka laser le ho sebetsa ka motlakase (EDM), e ntse e sutumelletsa meeli ea se ka khonehang ka aluminium, e nolofalletsa likarolo tse nang le mamello e thata le ho feta le li-geometri tse rarahaneng haholoanyane.

Ho tloha mofuteng o sa ratoeng haholo ho ea ho karolo ea bohlokoa, keketseho ea aluminium methaleng ea ho hloekisa ea semiconductor ke bopaki ba matla a boenjiniere bo nepahetseng le saense ea thepa. Ka ho sebelisa matla a tlhaho a aluminium le ho a ntlafatsa ka ho sebetsa ka mokhoa o tsoetseng pele oa lipoleiti tsa aluminium, mekoallo ea aluminium le lipeipi tsa aluminium, indasteri ea semiconductor e fumane thepa e fanang ka ts'ebetso e phahameng, litšenyehelo tse tlase le botsitso bo boholo, lintlha tsohle tsa bohlokoa 'marakeng o nang le tlholisano e phahameng. Ha masela a mangata a hlokomela melemo ea aluminium, karolo ea eona methaleng ea ho hloekisa e tla tsoela pele ho hola, e khanna boqapi le ho nolofalletsa moloko o latelang.tlhahisooftheknoloji ea semiconductor. Bokamoso ba ho hloekisa semiconductor bo bobebe, bo nepahetse, 'me bo sebetsa hantle, 'me bo hahiloe holim'a aluminium.