Kutsvaga machipisi madiki, anokurumidza, uye ane simba kwave kuchisunda maitiro ekugadzira kusvika padanho risati ramboonekwa rekururama, uye hapana imwe nzvimbo iri kumanikidzwa uku kwakanyanya kupfuura mumitsetse yekuchenesa machipisi. Masisitimu aya akakosha anobatsira kubvisa tsvina padanho reatomu, sezvo kunyangwe chidimbu chimwe chete che micron kana trace metal ion chinogona kuita kuti chipisi che 3nm chisashande. Kwemakore, indasitiri iyi yaivimba nezvinhu zvakamanikana, ichifungidzira kuti mashandiro aida kurasikirwa nemutengo, huremu, kana kugara kwenguva refu. Asi aruminiyamu yakagadzirwa nemazvo uye alloys ayo, kusanganisira yakagadzirwa nevatengi.ndiro dzearuminiyamu, simbi dzearuminiyamu,nemachubhu earuminiyamu, zvave chinhu chinochinja-chinja, zvichikanganisa zvinotarisirwa uye zvichiva chinhu chakakosha pakuchenesa kwepamusoro-soro. Iyi ndiyo nyaya yekuti aluminium, kuburikidza nekugadzira michina yepamusoro nesainzi yezvinhu, yakasvika sei pakuva chinhu chinokosha pakugadzira michina yesemiconductor.

Mitsetse yekuchenesa semiconductor inosanganisira maitiro akasiyana-siyana, kubva pakucheneswa nemakemikari akanyorova kusvika pakuchenesa plasma yakaoma, imwe neimwe iine zvinodiwa zvakasiyana. Mabhenji akanyorova, anoshandisa mishonga yemakemikari akasimba kubvisa maoxide netsvina yesimbi, anoda zvinhu zvinodzivisa ngura, kuderedza kudonha kwezvikamu, uye kutsigira kuyerera kwemvura kwakanyatsojeka. Masisitimu ekuchenesa plasma yeVacuum, kune rumwe rutivi, anoda kuenderana neUHV, kugadzikana kwekupisa, uye kuramba kukanganiswa nekukukurwa kunokonzerwa neplasma. Kwemakumi emakore, zvinodiwa izvi zvakaita kuti vagadziri vafarire zvinhu zvakaita se316L stainless steel yemaitiro akanyorova uye quartz yemakamuri eplasma, sarudzo dzaiuya nekuchinjana kwakakosha. Masisitimu ekubata otomatiki esimbi isina kusimba, nepo kufambisa kwayo kupisa kusina kunaka kwakakonzera kuderera kwekushisa kwakaderedza kufanana kwekuchenesa. Quartz, kunyangwe isina makemikari, haina kusimba uye inodhura, zvichikonzera mitengo yakakwira yekutsiva munzvimbo dzekugadzira dzakawanda.

Kukura kweAluminium kwakatanga nekuziva kuti hunhu hwayo hwepakutanga, huremu hwayo, kufambisa kwemafuta zvakanyanya, uye kugona kwayo kugadzira michina zvakanaka zvinogona kuvandudzwa kuburikidza nehunyanzvi hwekugadzira michina kuti isangane nezvinodiwa zve semiconductor grade, kunyanya kana yakagadzirwa mumaplate ealuminium akagadzirwa, mabhaa ealuminium, uye machubhu ealuminium. Kubudirira kukuru kwakauya muhunyanzvi hwekugadzira michina hwepamusoro hwakagadzirirwa hunhu hwakasiyana hwealuminum, zvichibvumira vagadziri kugadzira zvinhu zvinogadzirisa marwadzo chaiwo ekushanda kwemutsara wekuchenesa. Kugadzira michina yeCNC, pamwe chete nekuyedza kwe ultra-sonic uye kudzora kwemhando kwakasimba, kwakaita kuti aluminum isangane nezvinodiwa zvakanyanya zveindasitiri zvekururama kwehukuru uye kupedzisa pamusoro, zvichiita kuti masevhisi edu ekugadzira aluminum ave mubatsiri akakosha kune vagadziri vemidziyo ye semiconductor.

Imwe yenzira dzakakosha dzekushandisa aruminiyamu mumitsetse yekuchenesa ndeye mumakamuri eplasma evacuum, uko kubvumidzwa kwemagineti kwechinhu ichi kunodzivirira kukanganisa minda yeplasma yeRF, chinhu chakakosha pakuwana kucheneswa kwakafanana. Kusiyana nesimbi isina ngura, iyo inogona kukanganisakugoverwa kweplasma, ndiro yearuminiyamuMadziro ekamuri anovimbisa kuzara kweplasma panzvimbo yewafer, zvichideredza kuchinja kwemaitiro uye kuwedzera goho. Zvimiro zvekutsigira aluminium bar zvakagadzirwa nemachina chaiwo, zvakagadzirirwa kutsungirira kusiyana kwekumanikidzwa kweUHV, zvinopa hunhu hwakanaka pasina kuwedzera huremu. Pamusoro pezvo, midziyo yealuminium tube isina musono, yakagadzirwa kusvika ±0.003mm tolerances, inochengetedza hunhu hwakanaka hweUHV uku ichibvumira kupfuura kwemagasi emagetsi nemasaini emagetsi. Izvi zvikamu zvealuminium, zvakagadzirwa kubva ku6061-T6 alloy ine musono weCNC machining, zvinowana hunhu hwakanaka hweUHV nemazinga ekudonha kwehelium ari pasi pe10⁻⁹ mbar·L/s, zvichisangana nemazinga akasimba evacuum emhando yepamusoro ye semiconductor processes. Nzvimbo dzealuminium dzakasanganiswa dzinowedzera kushanda nekupa chipingamupinyi chakasimba, chinodzivirira ngura chinotsungirira kugara kwenguva refu kumarudzi eplasma anopindura senge oxygen nefluorine.

Mumasystem emvura, zvikamu zvearuminiyamu zvakaratidza kukosha kwazvo muzvishandiso zvekutakura mvura, zvinotakura mawafer, uye matangi ekushambidza, nemachubhu earuminiyamu, mapurati earuminiyamu, uye mabharu earuminiyamu zvichiumba musimboti wezvishandiso izvi zvine hungwaru hwakanyanya. Machubhu earuminiyamu akagadzirwa nemazvo (3mm ~ 200mm dhayamita) ane nzira dze micro-orifice dzinovimbisa mwero chaiwo wekuyerera kwemakemikari, zvakakosha pakuchengetedza ma profiles etching anowirirana mumawafers e 12-inch. Kusiyana nezvikamu zvepurasitiki, zvinogona kubvisa tsvina kana kuora nekufamba kwenguva, machubhu earuminiyamu haabudisi mweya uye anoenderana nemakemikari ese ekuchenesa akajairwa, anosanganisira 50:1 HF uye etchants dzakagadzirwa ne peroxide. Zvishandiso zvearuminiyamu plate wafer, zvakagadzirwa nemachina chaiwo ekubata mawafer zvakachengeteka panguva yekuchenesa, zvinopa imwe nzira yakareruka pane simbi isingatsvedzi, zvichideredza kuneta kwemaoko erobhoti uye zvichiita kuti nguva yekutenderera ikurumidze. Kufambisa kwavo kwakanyanya kwekupisa kunovimbisa kugoverwa kwakafanana kwekushisa panguva yekuchenesa, kuderedza warpage yewafer uye kuvandudza kusiyana kwehuwandu hwese hwekukora (TTV) kusvika pasi pe5%, chiyero chakakosha chekugadzirisa wafer yepamusoro. Pamusoro pezvo, simbi dzinotungamira simbi dzealuminium, dzakabatanidzwa mumasisitimu ekutakura mabhenji akanyorova, dzinopa kufamba kwakapfava, kusingakweshe, kunoderedza kugadzirwa kwezvidimbu uye kuvandudza kuvimbika kwemaitiro.

Zvakanakira mashandiro ealuminium zvinotsigirwa nedata rakaoma. Ongororo ichangobva kuitwa nemugadziri wemidziyo yesemiconductor akaenzanisa zvinhu zvealuminium nesimbi isina ngura mumutsara wekuchenesa webhenji wepamusoro, achitarisa pakushandiswa kwemachubhu ealuminium, mapurati ealuminium, uye machining akanyatsogadzirwa. Mhedzisiro yacho yaishamisa: machubhu ealuminium akadzikisa kushandiswa kwemakemikari ne12% nekuda kwekudzora kuyerera kwemvura, nepo machubhu ealuminium plate wafer akadzikisa nguva yekubata ne18% nekuda kwehuremu hwawo hwakareruka. Chinonyanya kukosha ndechekuti mutsetse une aluminium wakawana mwero wepamusoro we6.5% we5nm wafers, zvichikonzerwa nekusiyana kwekuchenesa uye kusvibiswa kwezvikamu. Kuvandudzwa uku kwakashandura kuchengetedza mari pagore kweanopfuura $2 miriyoni yekugadzirwa, ROI inokwezva yekuvandudza aluminium.

Imwe nzvimbo iyo aruminiyamu inobudirira zvikuru ndeyekutarisira kupisa, dambudziko guru mumitsetse yekuchenesa uko maitiro emakemikari ekunze uye maitiro eplasma zvinogadzira kupisa. Kufambiswa kwekupisa kweAruminiyamu (≈150 W/m·K) kwakapfuura katatu kupfuura simbi isina ngura, zvichibvumira kupisa kunopera zvakanaka uye kudzora tembiricha. Maplate ekutonhodza earuminiyamu akagadzirwa nemazvo, akabatanidzwa mumabhati ekugezera emvura uye makamuri eplasma, anochengetedza kugadzikana kwetembiricha mukati me ±0.5°C, zvichiita kuti kuchenesa kushande zvakanaka kunyangwe panguva yekugadzirwa kwenguva refu. Zvishandiso zvekupisa zvearuminiyamu, zvakabatana nemitsetse yearuminiyamu inotonhorera, zvinokurumidza kutamisa kupisa kubva kuzvinhu zvakakosha, zvichidzivirira kupisa zvakanyanya uye kuwedzera hupenyu hwemidziyo. Kugadzikana uku kwekupisa kunokosha zvikuru mumabasa epamusoro senge kuchenesa kweRCA, uko kudzora tembiricha kwakakodzera kwakakosha pakubvisa marara eorganic uye tsvina yesimbi pasina kukuvadza pamusoro pewafer.

Kugona kweAluminium kugadzira chimwe chinhu chakakosha, chinoita kuti pave nekugadzirwa kwezvinhu zvakaoma, zvakagadzirwa nevanhu zvinovandudza mashandiro ekuchenesa, kugona kwedumabasa ekugadzira aruminiyamu akasiyanaKusiyana nesimbi isingatsvi, iyo inoda maturusi akasarudzika uye nguva yakareba yekugadzira, aruminiyamu inogona kugadzirwa nemazvo kuita maumbirwo akaomarara ane kutsungirira kwakasimba (± 0.005mm) nemutengo wakaderera. Kuchinjika uku kunobvumira vagadziri vemidziyo kugadzira mitsetse yekuchenesa iri diki, inoshanda zvakanaka, uye yakagadzirirwa zvinodiwa pakuita zvinhu. Semuenzaniso, ma profiles ebhaaruminiyamu akagadzirwa nemazvo anoshandiswa mukuchenesa mitsetse nemafuremu, zvichipa kuomarara kwechimiro uku zvichideredza huremu hwemidziyo kusvika ku30%. Izvi hazvingodzikisi mari yekuisa chete asiwo zvinoita kuti zvive nyore kugadzirisa mitsetse yemitsetse mitsva, kugona kwakakosha muindasitiri umo tekinoroji inoshanduka nekukurumidza. Pamusoro pezvo, maplate earuminiyamu anokatyamadza, akagadziriswa nemapatani emaburi akagadziriswa, anovandudza kuyerera kwegasi mumakamuri eplasma, zvichiwedzera kuvandudza kufanana kwekuchenesa.

Mabhenefiti ekuchengetedza zvakatipoteredza ealuminium anowedzera kusimbisa kukosha kwayo mukugadzira semiconductor, uko mutoro wezvakatipoteredza uri kuramba uchikura. Aluminium inogona kushandiswazve 100% pasina kurasikirwa nehunhu, zvichideredza simba recarbon footprint yealuminum plate, aluminum bar, uye aluminum tube components. Zvinodiwa zvayo zvesimba shoma pakugadzira nekufambisa zvinobatsirawo mukushanda kwegirinhi, zvichienderana nechinangwa cheindasitiri chekuderedza kukanganisa zvakatipoteredza. Kune mafekitori ari kutsvaga kuzadzisa zvinangwa zvekuchengetedza zvakatipoteredza uku achiramba achiita basa, aluminum inopa mukana wakajeka pamusoro pezvinhu zvechinyakare.

Sezvo maitiro e semiconductor achifambira mberi kusvika ku2nm zvichikwira, zvinodiwa pamitsetse yekuchenesa zvichawedzera chete uye aruminiyamu iri panzvimbo yakanaka yekusangana nematambudziko aya. Kuvandudzwa kuri kuenderera mberi mukugadzirwa kwe aruminiyamu, senge kuunzwa kwe 5083 ne 7075 alloys yakachena, kuri kuwedzera simba rechinhu ichi uye kuramba ngura, zvichiwedzera mashandisirwo azvo kunyange mumabasa ekuchenesa akaomarara. Matekiniki epamusoro ekugadzira, anosanganisira laser machining uye electrical discharge machining (EDM), ari kuwedzera kusundira miganhu yezvinogona kuitwa nearuminiyamu, zvichiita kuti zvikamu zvive nekutsungirira kwakanyanya uye geometries dzakaoma.

Kubva pane imwe nzira isingakosheswi zvakanyanya kuenda kune chinhu chisingadikanwi, kukwira kwearuminiyamu mumitsetse yekuchenesa semiconductor chiratidzo chesimba reinjiniya chaiyo uye sainzi yezvinhu. Nekushandisa simba rearuminiyamu uye kurivandudza kuburikidza nekugadzirwa kwepamusoro kwemaplate earuminiyamu, mabhaa earuminiyamu, nemachubhu earuminiyamu, indasitiri yesemiconductor yawana zvinhu zvinopa kushanda kwepamusoro, mitengo yakaderera, uye kugara kwenguva refu, zvese zvinhu zvakakosha mumusika une makwikwi makuru. Sezvo hunyanzvi hwakawanda huchicherechedza mabhenefiti earuminiyamu, basa rayo mumitsetse yekuchenesa richaramba richikura, richitungamira hunyanzvi uye richigonesa chizvarwa chinotevera.kubatanidzwaoftekinoroji yesemiconductor. Remangwana rekuchenesa semiconductor rakareruka, rakarurama, uye rinoshanda zvakanaka, uye rakavakirwa paaruminiyamu.