Kufunafuna kosalekeza kwa makampani opanga ma semiconductor ma chips ang'onoang'ono, othamanga, komanso amphamvu kwambiri kwapangitsa kuti njira zopangira zinthu zikhale zolondola kwambiri, ndipo palibe malo ena aliwonse omwe kupanikizika kumeneku kuli koopsa kuposa mizere yoyeretsera ma semiconductor. Machitidwe ofunikira awa ndi omwe amachititsa kuchotsa zodetsa pamlingo wa atomiki, chifukwa ngakhale tinthu tating'onoting'ono tomwe tili ndi micron kapena ion yachitsulo tingapangitse chip ya 3nm kukhala yopanda ntchito. Kwa zaka zambiri, makampaniwa amadalira zinthu zochepa, poganiza kuti magwiridwe antchito amafunikira kupatula mtengo, kulemera, kapena kulimba. Koma aluminiyamu yopangidwa mwaluso ndi zitsulo zake, kuphatikizapo zopangidwa mwamakonda.mbale za aluminiyamu, mipiringidzo ya aluminiyamu,ndi machubu a aluminiyamu, asintha kwambiri zinthu, akunyalanyaza ziyembekezo ndipo akhala ofunikira kwambiri pa ntchito yoyeretsa yapamwamba. Iyi ndi nkhani ya momwe aluminiyamu, kudzera mu makina apamwamba komanso sayansi ya zinthu, yakhala maziko a luso lopanga zinthu za semiconductor.

Mizere yoyeretsera ya semiconductor imaphatikizapo njira zosiyanasiyana, kuyambira kupukuta ndi kutsuka mankhwala onyowa mpaka kutsuka plasma youma, iliyonse ili ndi zofunikira zapadera. Mabenchi onyowa, omwe amagwiritsa ntchito njira zamphamvu zamankhwala kuti achotse ma oxide ndi zodetsa zachitsulo, amafunikira zinthu zomwe zimalimbana ndi dzimbiri, kuchepetsa kutayika kwa tinthu, ndikuthandizira kuyenda kwa madzi molondola. Kumbali ina, makina oyeretsera plasma otsukira vacuum amafuna kugwirizana kwa UHV, kukhazikika kwa kutentha, komanso kukana kukokoloka komwe kumabwera chifukwa cha plasma. Kwa zaka zambiri, zofunikirazi zidapangitsa opanga kukonda zipangizo monga chitsulo chosapanga dzimbiri cha 316L pazinthu zonyowa ndi quartz ya zipinda za plasma, zosankha zomwe zidabwera ndi kusintha kwakukulu. Makina oyendetsera odziyimira pawokha a chitsulo chosapanga dzimbiri, pomwe kutentha kwake koipa kunayambitsa kutentha komwe kumachepetsa kufanana kwa kuyeretsa. Quartz, ngakhale kuti ndi yopanda mankhwala, ndi yofooka komanso yokwera mtengo, zomwe zimapangitsa kuti pakhale ndalama zambiri zosinthira m'malo opangira zinthu zambiri.

Kukwera kwa aluminiyamu kunayamba ndi kuzindikira kuti makhalidwe ake enieni, kupepuka, kutentha kwambiri, komanso makina abwino kwambiri zitha kukulitsidwa kudzera mu uinjiniya wolondola kuti zikwaniritse miyezo ya semiconductor grade, makamaka zikapangidwa kukhala mbale za aluminiyamu, mipiringidzo ya aluminiyamu, ndi machubu a aluminiyamu. Kupambana kwakukulu kudabwera mu njira zamakono zopangira makina zopangidwa kuti zigwirizane ndi mawonekedwe apadera a aluminiyamu, zomwe zimathandiza opanga kupanga zinthu zomwe zimathetsa mavuto enieni a ntchito zotsukira mzere. Kupanga makina molondola kwa CNC, kuphatikiza kuyesa kwa ultra-sound ndi kuwongolera bwino khalidwe, kwathandiza aluminiyamu kukwaniritsa zofunikira kwambiri zamakampani kuti zikhale zolondola kwambiri komanso zomaliza pamwamba, zomwe zimapangitsa ntchito zathu zopangira makina a aluminiyamu kukhala bwenzi lofunikira kwa opanga zida za semiconductor.

Chimodzi mwa zinthu zofunika kwambiri zomwe zimagwiritsidwa ntchito popanga aluminiyamu m'mizere yoyeretsera ndi m'zipinda za plasma zotsukira, komwe mphamvu ya maginito ya chinthucho imalepheretsa kusokonekera kwa minda ya plasma ya RF, chinthu chofunikira kwambiri pakukwaniritsa kuyeretsa kofanana. Mosiyana ndi chitsulo chosapanga dzimbiri, chomwe chingasokonezekugawa kwa plasma, mbale ya aluminiyamuMakoma a chipinda amaonetsetsa kuti plasma imakhala yolimba nthawi zonse pamwamba pa wafer, kuchepetsa kusintha kwa njira ndikuwonjezera phindu. Mapangidwe othandizira a aluminiyamu opangidwa bwino, opangidwa kuti apirire kusiyana kwa kuthamanga kwa UHV, amapereka umphumphu wa kapangidwe popanda kuwonjezera kulemera kowonjezera. Kuphatikiza apo, ma vacuum feedthroughs a chubu cha aluminiyamu chosasunthika, opangidwa mpaka ±0.003mm tolerances, amasunga umphumphu wa UHV pomwe amalola kuti mpweya wa processing ndi ma signaling amagetsi adutse. Zigawo za aluminiyamu izi, zopangidwa kuchokera ku 6061-T6 alloy yokhala ndi CNC machining yosasunthika, zimakwaniritsa magwiridwe antchito a UHV ndi kuchuluka kwa helium leak rates pansi pa 10⁻⁹ mbar·L/s, zomwe zimakwaniritsa miyezo yokhwima kwambiri ya vacuum ya njira zapamwamba za semiconductor. Malo a aluminiyamu osungunuka amawonjezera magwiridwe antchito popereka chotchinga cholimba, chosagwira dzimbiri chomwe chimapirira kuwonekera kwa nthawi yayitali ku mitundu ya plasma yogwira ntchito monga mpweya ndi fluorine.

Mu makina onyowa, zida za aluminiyamu zatsimikizira kufunika kwawo mu manifold operekera madzi, zonyamulira ma wafer, ndi matanki otsukira, okhala ndi machubu a aluminiyamu, mbale za aluminiyamu, ndi mipiringidzo ya aluminiyamu zomwe zimapanga maziko a makina olondola kwambiri awa. Machubu a aluminiyamu opangidwa bwino (3mm ~ 200mm m'mimba mwake) okhala ndi njira zazing'ono zowunikira amatsimikizira kuchuluka kwa mankhwala oyenda bwino, ofunikira kwambiri kuti ma profiles okhazikika a ma wafer a mainchesi 12 asungidwe. Mosiyana ndi zida zapulasitiki, zomwe zimatha kutulutsa zodetsa kapena kuwonongeka pakapita nthawi, manifold a machubu a aluminiyamu ndi otsika mpweya ndipo amagwirizana ndi mankhwala onse oyeretsera wamba, kuphatikiza 50:1 HF ndi ma etchant okhala ndi peroxide. Zonyamulira ma wafer a mbale ya aluminiyamu, zopangidwa ndi mipata yolondola kuti zigwire ma wafer mosamala poyeretsa, zimapereka njira yopepuka m'malo mwa chitsulo chosapanga dzimbiri, kuchepetsa kutopa kwa mkono wa robotic ndikupangitsa nthawi yofulumira yozungulira. Kutentha kwawo kwakukulu kumatsimikizira kufalikira kwa kutentha kofanana panthawi yoyeretsa, kuchepetsa wafer warpage ndikukweza kusiyana kwa makulidwe onse (TTV) mpaka pansi pa 5%, muyezo wofunikira kwambiri pakukonza ma wafer apamwamba. Kuphatikiza apo, zitsulo zowongolera zitsulo za aluminiyamu, zomwe zimaphatikizidwa mu njira zonyamulira zinthu zonyowa, zimapereka kayendedwe kosalala komanso kopanda kukangana kwa zonyamulira za wafer, kuchepetsa kupanga tinthu tating'onoting'ono ndikuwongolera kudalirika kwa njira.

Ubwino wa ntchito ya aluminiyamu ukuthandizidwa ndi deta yolimba. Kafukufuku waposachedwa wopangidwa ndi wopanga zida za semiconductor wodziwika bwino adayerekeza zida za aluminiyamu ndi zitsulo zosapanga dzimbiri mu mzere woyeretsera wa benchi wonyowa kwambiri, kuyang'ana kwambiri momwe machubu a aluminiyamu amagwirira ntchito, mbale za aluminiyamu, ndi makina olondola amagwirira ntchito. Zotsatira zake zinali zodabwitsa: manifold a chubu cha aluminiyamu adachepetsa kugwiritsa ntchito mankhwala ndi 12% chifukwa cha kuyendetsa bwino kayendedwe ka madzi, pomwe zonyamulira za aluminiyamu mbale za wafer zidachepetsa nthawi yogwirira ntchito ndi 18% chifukwa cha kulemera kwawo kopepuka. Chofunika kwambiri, mzere wokhala ndi aluminiyamu udapeza chiwongola dzanja chapamwamba cha 6.5% cha ma wafer a 5nm, chifukwa cha kuyeretsa kofanana komanso kuchepa kwa kuipitsidwa kwa tinthu tating'onoting'ono. Kusinthaku kunapangitsa kuti ndalama zokwana $2 miliyoni pachaka zisungidwe, zomwe zinali phindu lalikulu pakukonzanso aluminiyamu.

Gawo lina lomwe aluminiyamu imachita bwino kwambiri ndi kasamalidwe ka kutentha, vuto lalikulu pamizere yoyeretsera komwe machitidwe a exothermic chemical ndi njira za plasma zimapangitsa kutentha. Kuyenda kwa kutentha kwa aluminiyamu (≈150 W/m·K) kuli kopitilira katatu kuposa chitsulo chosapanga dzimbiri, zomwe zimapangitsa kuti kutentha kusamayende bwino komanso kuwongolera kutentha. Ma plate ozizira a aluminiyamu opangidwa ndi makina opangidwa bwino, ophatikizidwa m'malo osambira onyowa ndi zipinda za plasma, amasunga kukhazikika kwa kutentha mkati mwa ±0.5°C, kuonetsetsa kuti kuyeretsa kumachitika bwino ngakhale panthawi yayitali yopangira. Zosinthira kutentha za aluminiyamu, zolumikizidwa ndi mizere yoziziritsira ya chubu cha aluminiyamu, zimasuntha kutentha mwachangu kutali ndi zinthu zofunika kwambiri, kupewa kutentha kwambiri ndikuwonjezera nthawi ya moyo wa zida. Kukhazikika kwa kutentha kumeneku ndikofunikira kwambiri panjira zapamwamba monga kuyeretsa kwa RCA, komwe kuwongolera kutentha kolondola ndikofunikira pochotsa zotsalira za organic ndi zodetsa zachitsulo popanda kuwononga pamwamba pa wafer.

Kugwira ntchito bwino kwa aluminiyamu ndi phindu lina lalikulu, lomwe limalola kupanga zinthu zovuta, zopangidwa mwamakonda zomwe zimapangitsa kuti mzere woyeretsera ugwire bwino ntchito, zomwe zimapangitsa kuti ntchito yathu yoyeretsa iyende bwino.ntchito zopangira aluminiyamu zosiyanaMosiyana ndi chitsulo chosapanga dzimbiri, chomwe chimafuna zida zapadera komanso nthawi yayitali yopangira zinthu, aluminiyamu imatha kupangidwa mwaluso kwambiri kukhala mawonekedwe ovuta okhala ndi zolekerera zolimba (± 0.005mm) pamtengo wotsika kwambiri. Kusinthasintha kumeneku kumalola opanga zida kupanga mizere yoyeretsera yomwe ndi yaying'ono, yogwira ntchito bwino, komanso yokonzedwa kuti igwirizane ndi zofunikira zinazake. Mwachitsanzo, ma profiles a aluminiyamu opangidwa mwaluso amagwiritsidwa ntchito poyeretsa mafelemu ndi makoma, zomwe zimapangitsa kuti kapangidwe kake kakhale kolimba pomwe zimachepetsa kulemera kwa zida zonse ndi 30%. Izi sizimangochepetsa ndalama zoyikira komanso zimapangitsa kuti zikhale zosavuta kukonzanso mizere ya njira zatsopano, zomwe ndi luso lofunikira kwambiri mumakampani omwe ukadaulo umasintha mwachangu. Kuphatikiza apo, ma baffle a aluminiyamu, opangidwa ndi mapangidwe a mabowo apadera, amawongolera kuyenda kwa mpweya m'zipinda za plasma, ndikupititsa patsogolo kufanana kwa kuyeretsa.

Ubwino wa aluminiyamu wokhazikika umalimbitsanso ntchito yake popanga zinthu za semiconductor, komwe udindo pa chilengedwe ukukhala chinthu chofunikira kwambiri. Aluminiyamu imatha kubwezeretsedwanso 100% popanda kutayika kwa ubwino, zomwe zimachepetsa mpweya wa mbale ya aluminiyamu, bala la aluminiyamu, ndi zida za aluminiyamu. Kufunikira kwake kochepa kwa mphamvu pakupanga ndi mayendedwe kumathandiziranso kuti ntchito zobiriwira ziyende bwino, mogwirizana ndi cholinga cha makampani chochepetsa kuwononga chilengedwe. Kwa opanga omwe akufuna kukwaniritsa zolinga zokhazikika pamene akugwira ntchito bwino, aluminiyamu imapereka mwayi woonekeratu kuposa zipangizo zachikhalidwe.

Pamene njira zopangira ma semiconductor zikupitirira kufika pa 2nm ndi kupitirira apo, kufunikira kwa mizere yoyeretsera kudzawonjezeka ndipo aluminiyamu ili pamalo abwino oti ikwaniritse zovuta izi. Zatsopano zomwe zikuchitika pakupanga aloyi ya aluminiyamu, monga kuyambitsa ma aloyi a 5083 ndi 7075 oyera kwambiri, zikuwonjezera mphamvu ya chipangizocho komanso kukana dzimbiri, ndikukulitsa ntchito zake ngakhale m'njira zoyeretsera zovuta kwambiri. Njira zamakono zopangira machining, kuphatikizapo machining a laser ndi machining otulutsa magetsi (EDM), zikupitirirabe kupititsa patsogolo malire a zomwe zingatheke ndi aluminiyamu, zomwe zimathandiza kuti zigawo zikhale ndi zolekerera zolimba komanso geometries zovuta kwambiri.

Kuchokera ku njira ina yosafunikira kwenikweni kupita ku chinthu chofunikira kwambiri, kukwera kwa aluminiyamu mu mizere yoyeretsera ya semiconductor ndi umboni wa mphamvu ya uinjiniya wolondola ndi sayansi ya zinthu. Pogwiritsa ntchito mphamvu za aluminiyamu ndikuzikulitsa kudzera mu makina apamwamba a mbale za aluminiyamu, mipiringidzo ya aluminiyamu, ndi machubu a aluminiyamu, makampani opanga ma semiconductor apeza zinthu zomwe zimapereka magwiridwe antchito apamwamba, ndalama zochepa, komanso kukhazikika kwakukulu, zonse zofunika pamsika wopikisana kwambiri. Pamene zinthu zambiri zopanga aluminiyamu zikuzindikira ubwino wa aluminiyamu, ntchito yake pamizere yoyeretsera ipitiliza kukula, kuyendetsa luso ndikupanga njira yatsopano yopezera zinthu zatsopano.kusinthidwaofukadaulo wa semiconductor. Tsogolo la kuyeretsa semiconductor ndi lopepuka, lolondola, komanso lothandiza, ndipo lamangidwa pa aluminiyamu.