Iiskena zeLithography kunye neenkqubo ze-etch zimi njengezona zinto zibalulekileyo zokwenza iitships, zihlala zithwala amaxabiso afikelela kumakhulu ezigidi. Kodwa bambalwa abangaphandle koshishino abaqondayo ukuba ulwakhiwo lwamathambo kunye nezinto zangaphakathi zezi zixhobo zokuchaneka zakhiwe phantse ngokupheleleyo ngendlela ebonakala ngathiizinto ezithobekileyo: i-aluminium alloyLe ayisiyo i-aluminium eqhelekileyo esetyenziselwa izakhelo zeefestile zokwakha, kodwa yi-aluminium yodidi lwe-semiconductor eyenzelwe ngokukodwa iindawo zokusebenza ezicocekileyo kakhulu nezichanekileyo. Apha ngezantsi kukho uhlalutyo olupheleleyo lweenkqubo ezintandathu ze-aluminium eziphambili ezinika amandla izixhobo zokwenza i-semiconductor eziphambili.

1. I-Aluminiyam yoLwakhiwo oluPhambili: Isakhelo sokuThutha imithwalo seZixhobo

Ezi ngxube zakha isakhiwo esisisiseko seegumbi zenkqubo, iigumbi zokudlulisa iiwafer kunye namaqonga okuxhasa izixhobo.

Uhlobo oluphambili yi-aluminium engama-6061, kunye ne-temperament ye-T651 esebenza njengomgangatho wegolide kwiindawo ezibalulekileyo zesakhiwo.

Ubushushu be-T651 busebenzisa ukolula okulawulwayo emva kokucinywa ukuze kupheliswe uxinzelelo lwangaphakathi olushiyekileyo, okuqinisekisa uzinzo olunemilinganiselo nokuba emva komatshini we-CNC ochanekileyo kakhulu.

Olu zinzo oluqhelekileyo luqinisekisa ukuba iingalo zokuphatha i-wafer zerobhothi zinokufikelela ekuchanekeni kokubekwa kwinqanaba le-micron ngaphakathi kwamagumbi okucoca avaliweyo.

Imveliso yasekhaya yeeprofayili ze-semiconductor ze-6061-T651 ifikelele kubudala obupheleleyo, inika unikezelo oluthembekileyo nolunokwandiswa lwezixhobo ze-OEM.

2. Izixhobo zoMatshini ezichanekileyo eziphantsi koxinzelelo: Amaqonga eSubstrate aphantsi kakhulu

Ezi zinto zisetyenziselwa ii-chamber liners kunye nee-precision base plates, zifuna i-sub-micron flatness kunye ne-zero post-machining deformation.

Amanqanaba aphambili aquka ipleyiti yezixhobo ze-aluminium ze-6061-T651 kunye ne-MIC-6.

I-MIC-6 yi-cast echanekileyoipleyiti ye-aluminium eyenziwe ngeisakhiwo esincinci esingenaxinzelelo ngokwemvelo, esilungiselelwe ukwenziwa ngomatshini onyamezelayo ngaphandle konyango olongezelelweyo lokunciphisa uxinzelelo.

Nangona abathengisi basekhaya benze inkqubela phambili enkulu kwezobuchwepheshe, iipleyiti ezinkulu kakhulu ezichanekileyo zisaxhomekeke kakhulu ekuthengeni kwamanye amazwe, kwaye ezinye iindlela zasekhaya zivala umsantsa wokusebenza ngokukhawuleza.

3. Izakhiwo zeSheet Metal kunye nezoNcedo: Imvulophu yezixhobo kunye nokuPhefumla

Ezi zinto zenza izixhobo ezivalekileyo, iiphaneli zokukhusela kunye nemijelo yokungenisa umoya kwimigca yemveliso yefab.

I-5052 kunye ne-3003 ziphambili kweli candelo. Zibonelela ngokumelana nokugqwala okulinganayo, ukudityaniswa okugqwesileyo kunye namaxabiso aphantsi, nto leyo ezenza zibe zezona zixhobo ze-aluminium ezingasetyenziswa kakhulu kwiindawo ze-semiconductor.

Iintambo zokubonelela ngempahla zasekhaya sele zisebenza, ngaphandle kokuxhomekeka kwimithombo yaphesheya ukuze kufumaneke iinkcukacha ezisemgangathweni zephepha kunye neetyhubhu.

4. Izinto ezisetyenziswayo kwiPlasma Process: Izinto zokunxiba zeChamber Etch

Zifakwe ngaphakathi njengee-etchers zegumbi, ii-focus rings kunye ne-process baffles, ezi ndawo zijongene nokuqhushumba okuqhubekayo okuvela kwi-plasma enamandla ngexesha lokucubungula i-wafer.

I-aluminium alloy ye-5083 yeyona nto ikhethwayo apha.

Umxholo wayo ophezulu we-magnesium unika ukumelana nokugqwala okugqwesileyo kunye nobomi obude benkonzo kwiindawo ezinzima zeplasma, nto leyo eyenza ukuba ibe yeyona nto isetyenziswa kakhulu kwizixhobo zokugqwala.

Ukutshintshwa kwezinto ezisetyenziswayo ze-semiconductor ze-5083 ekhaya kukhawulezisa ngesantya esiphezulu, kwaye abavelisi basekhaya ngoku bafanisa ukusebenza kwezinto ezivela kwamanye amazwe kwizicelo ezininzi eziqhelekileyo.

5. I-Aluminiyam ecocekileyo kakhulu: Izinto ezibalulekileyo zokusebenza kwigumbi lokucoca

Ezi zinto zisetyenziselwa ukutshiza iithagethi kunye neentloko zeshawa ezinegesi, zidibana ngqo neewafers ngexesha leenkqubo zokufaka kunye nokugrumba.

Amanqanaba aqhelekileyo okucoceka aqala kwi-4N5 (99.995%) ukuya kwi-5N (99.999%).

Amanqanaba okungcola kufuneka alawulwe ngokungqongqo kumanqanaba okutsalwa kweempahla, njengoko nokuba ungcoliseko oluncinci lwesinyithi lunokonakalisa zonke ii-wafer batches kwaye lunciphise isivuno.

Eli candelo lobuchwepheshe lihlala liyimiqobo emikhulu, elilawulwa ngaphambili ngabavelisi baseJapan naseMelika, nangona abavelisi basekhaya besenza inkqubela phambili yophando nophuhliso olujolise ekufumaneni indawo epheleleyo.

6. Izixhobo ezidityanisiweyo ezisebenzayo: Izisombululo zoLawulo loBushushu oluPhambili

Isetyenziswa njengezinto zokusasaza ubushushu kwiitships ezinamandla aphezulu kunye nokupakisha izixhobo ze-microwave ngaphakathi kwizixhobo.

I-aluminium silicon carbide (Al-SiC) composite yeyona nto iphambili kolu luhlu.

Idibanisa ukukhanya okukhaphukhaphuinzuzo ye-aluminium enexabiso eliphantsiukwandiswa kobushushu kunye nokuqhuba okuphezulu kobushushu be-ceramic, ukusombulula imingeni yolawulo lobushushu ekudala ikho kwizixhobo ze-semiconductor ezinoxinano olukhulu.

Ubunjineli Bomphezulu: Isiphindaphindi Sokugqibela Sokusebenza

Umgangatho wezinto ezisisiseko ubeka isiseko, kodwa iingubo zomphezulu zimisela ubomi benkonzo yokwenyani kunye nokuzinza kwexesha elide kwezixhobo ze-aluminium semiconductor.

Iinkqubo ezifana ne-hard anodizing kunye ne-yttrium oxide (Y₂O₃) thermal spray coats zenza umqobo oqinileyo okhusela i-aluminium substrates ekukhukulisekeni kwe-plasma kunye nokuhlaselwa ngamakhemikhali.

Itekhnoloji yokubeka umphezulu ephucukileyo iseyenye yezona ngxaki ziphambili ekusetyenzisweni kwezixhobo ze-semiconductor zasekhaya ngokupheleleyo.

Ukususela kwizakhelo zesakhiwo ezingama-6061 kunye nezinto ezisetyenziswayo zeplasma ezingama-5083 ukuya kwizinto ezisebenzayo ze-aluminium ezicocekileyo kakhulu kunye neengubo eziphezulu zomphezulu, inkqubo yezinto ze-aluminium epheleleyo ixhasa ngokuzolileyo ihlabathi eliqhutywa ngokuchanekileyo lokwenziwa kweetshiphusi. Njengomthengisi okhethekileyo weeshiti ze-aluminium ze-semiconductor-grade, iibha, iityhubhu kunye neenkonzo zoomatshini be-CNC ezichanekileyo, sinikezela ngepotifoliyo epheleleyo yee-alloys ezisemgangathweni zoshishino ezingama-6061, 5052, 5083 kunye nezinye ii-alloys ezisemgangathweni zoshishino, ezenziwe ngokweemfuno zococeko olungqongqo kunye nokunyamezelana okulinganayo. Iqela lethu loomatshini bangaphakathi lixhasa ukwenziwa ngokwezifiso kwezixhobo ze-semiconductor kunye nezinto ezisetyenziswayo, kunceda izixhobo zehlabathi ze-OEM zakha imixokelelwane yokubonelela eqinileyo nengabizi kakhulu.