Ma "lithography scanners" uye masisitimu e "etch" ndiwo matombo makuru ekugadzira ma "chip", anowanzo takura mitengo inosvika mazana emamiriyoni. Asi vashoma vari kunze kweindasitiri vanoziva kuti mapfupa emukati mezvishandiso izvi zvakanyatsogadzirwa kubva mu "mota" chaiyo.zvinhu zvakazvininipisa: aruminiyamu alloyIyi haisi iyo aruminiyamu yakajairika inoshandiswa pamafuremu emahwindo ekuvaka, asi iaruminiyamu yemhando yepamusoro yakagadzirwa nearuminiyamu yakagadzirirwa nzvimbo dzekushanda dzakachena zvakanyanya uye dzakarurama. Pazasi pane kutsanangurwa kwakazara kwemasisitimu matanhatu epakati earuminiyamu anotsigira michina yekugadzira semiconductor yepamusoro.

1. Aruminiyamu Yekuvaka: Mudziyo Unotakura Mutoro

Ma alloys aya ndiwo anoumba hwaro hwemakamuri ekugadzirisa, makamuri ekutamisa ma wafer uye mapuratifomu ekutsigira michina.

Rudzi rwechigadzirwa chikuru i6061 aruminiyamu, ine tembiricha yeT651 inoshanda seyero yepamusoro yezvikamu zvakakosha zvechivakwa.

T651 tender inoshandisa nzira yekutambanudza mushure mekudzima kuti ibvise kushushikana kwemukati, ichivimbisa kugadzikana kwehukuru kunyangwe mushure mekugadziriswa kweCNC kwakanyatsogadzirwa.

Kugadzikana uku kuri pachena kuti maoko ekubata mawafer erobhoti anogona kuwana kunyatsorongeka kwekuisa zvinhu mukati memakamuri evacuum akavharwa.

Kugadzirwa kwe6061-T651 semiconductor-grade profiles mudzimba kwasvika pakukura kwakazara, zvichipa huwandu hwakavimbika uye hunogona kuwedzerwa hwezvishandiso zveOEM.

2. Zvishandiso zveMachina Zvakanyatsonaka Zvisina Kushushikana: Mapuratifomu eSubstrate Akanyanya Kutsetseka

Zvinoshandiswa pakugadzira machira emukamuri nemaplate epasi akanyatsogadzirwa, zvinhu izvi zvinoda hutete hwe sub-micron uye kusachinja-chinja mushure mekugadzira.

Magiredhi ekutanga anosanganisira 6061-T651 uye MIC-6 cast aluminum tooling plate.

MIC-6 imhando yemhando chaiyondiro yealuminium yakagadzirwa nechimiro chidiki chisinganyanyi kushushikana, chakagadzirira kugadzirwa pasina kuwedzera kurapwa kwekushushikana.

Kunyange hazvo vatengesi vemuno vakafambira mberi zvikuru muhunyanzvi, ma "high-format high-efficient plates" achiri kuvimba zvakanyanya nekutenga zvinhu zvinotengeswa kunze kwenyika, uye dzimwe nzira dzemuno dzichivhara musiyano wekushanda nekukurumidza.

3. Magadzirirwo esimbi nesimbi dzekubatsira: Envelopu yemidziyo nemhepo inofema

Zvinhu izvi zvinoumba nzvimbo dzemidziyo, mapaneru ekudzivirira uye nzira dzekufema dzinoshandiswa pakugadzira zvinhu.

5052 na3003 ndizvo zvinonyanya kukosha muchikamu ichi. Dzinopa simba rekudzivirira ngura, dzinochinjika zvakanaka uye mitengo inochengetedza mari, zvichiita kuti dzive zvinhu zvealuminium zvisinganyanyi kushandiswa zvakanyanya muzvivakwa zve semiconductor.

Maketani ezvekugovera zvinhu zvemuno atovapo, pasina kuvimba nemidziyo yekune dzimwe nyika kuti iwane zvinodiwa papepa nemachubhu.

4. Zvinoshandiswa muPlasma Process: Zvikamu zveEtch Chamber Wear

Zvikamu izvi zvakaiswa mukati me etchers se chamber liners, focus rings uye process baffles, zvinoramba zvichisangana nekurwiswa kunobva ku plasma ine simba panguva yekugadzira wafer.

5083 alloy yealuminium ndiyo inonyanya kusarudzwa pano.

Kuwanda kwemagnesium mu magnesium kunoita kuti irambe ichidzivirira ngura zvakanyanya uye igare kwenguva refu munzvimbo dzine plasma dzakaoma, zvichiita kuti ive chinhu chikuru chinoshandiswa pakugadzira michina.

Kutsiviwa kwemidziyo inoshandiswa mudzimba ye5083 semiconductor kuri kukurumidza, vagadziri vedzimba vava kutevedzera mashandiro emidziyo inotengeswa kunze kwenyika mumashandisirwo mazhinji.

5. Aruminiyamu Yakachena Zvikuru: Zvikamu Zvinokosha Zvebasa Rekuchenesa

Zvinoshandiswa pakuputira zvinhu zvinobuda muchubhu uye misoro yeshawa ine gasi, zvinhu izvi zvinosangana zvakananga nemawafer panguva yekuiswa uye kuchekwa.

Mazinga ekuchena akajairika anotangira pa4N5 (99.995%) kusvika pa5N (99.999%).

Kusvibiswa kunofanira kudzorwa zvakasimba padanho rezvishoma, sezvo kusvibiswa kudiki kwesimbi kunogona kukanganisa mawafer ese uye kuderedza goho.

Iri richiri chikamu chetekinoroji chinodzivirira zvakanyanya, chakagara chichitongwa nevagadziri vekuJapan nevekuUS, kunyangwe vagadziri vemuno vari kufambira mberi zvakanyanya mukutsvaga nekuvandudza ruzivo rwezvekudya kuti vagadzire zvigadzirwa zvavo munzvimbo dzakasiyana.

6. Zvinhu Zvinoshanda Zvakasanganiswa: Mhinduro dzeKutarisira Kupisa Dzakakura

Inoshandiswa sezvinhu zvinobvisa kupisa mumachipisi ane simba guru uye zvinhu zvinoputirwa mukati memidziyo ye microwave.

Aluminium silicon carbide (Al-SiC) composite ndiyo inonyanya kukosha muchikamu ichi.

Inosanganisa yakarerukamukana wearuminiyamu nemutengo wakadererakuwedzera kupisa uye kufambiswa kwepamusoro kwekupisa kweceramic, zvichigadzirisa matambudziko enguva refu ekutarisira kupisa mumidziyo ye semiconductor ine density yakakura.

Unyanzvi hwepamusoro: Mushonga wekupedzisira wekushanda

Hunhu hwezvinhu zvepasi hunogadzira hwaro, asi machira epamusoro anosarudza hupenyu chaihwo hwebasa uye kugadzikana kwenguva refu kwezvikamu zve semiconductor zvealuminium.

Maitiro akadai se hard anodizing uye yttrium oxide (Y₂O₃) thermal spray coatings zvinogadzira chidziviriro chakakora chinodzivirira aruminiyamu kubva mukukurwa kweplasma uye kurwiswa nemakemikari.

Tekinoroji yepamusoro yekuputira pamusoro ichiri chimwe chezvipingamupinyi zvikuru mukushandiswa kwemidziyo ye semiconductor yemumba.

Kubva pamafuremu e6061 ekuvaka uye 5083 eplasma consumables kusvika kuzvinhu zvinoshanda zvealuminium zvine hutsanana hwakanyanya uye machira epamusoro epamusoro, ecosystem yezvinhu zvealuminium zvese zvinotsigira chinyararire nyika yekugadzira machip inotungamirwa nekunyatsorongeka. Semupi wehunyanzvi hwemashiti ealuminium emhando ye semiconductor, mabhawa, machubhu uye masevhisi ekugadzira machining eCNC, tinopa huwandu hwakazara hwe6061, 5052, 5083 nedzimwe alloys dzakajairwa muindasitiri, dzakagadzirwa zvichienderana nekuchena kwakanyanya uye zvinodiwa zvekushivirira mativi ese. Chikwata chedu chekugadzira machining chinotsigira kugadzirwa kwezvikamu zvemachining e semiconductor nemidziyo inoshandiswa, zvichibatsira maOEM emidziyo yepasi rose kuvaka cheni dzekutengesa dzakasimba uye dzisingadhuri.