Ma scanner a Lithography ndi makina ojambulira ndi omwe amaika patsogolo kwambiri popanga ma chip, nthawi zambiri amakhala ndi mitengo yokwana mamiliyoni ambiri. Komabe, ndi ochepa okha omwe sadziwa kuti kapangidwe kake ndi zida zamkati mwa zida izi zimapangidwa kuchokera ku zinthu zooneka ngatizinthu zodzichepetsa: aluminiyamu alloyIyi si aluminiyamu yokhazikika yomwe imagwiritsidwa ntchito popanga mafelemu a zenera, koma aluminiyamu yopangidwa mwapadera ya semiconductor grade yopangidwira malo ogwirira ntchito oyera kwambiri komanso olondola kwambiri. Pansipa pali kusanthula kwathunthu kwa makina asanu ndi limodzi a aluminiyamu omwe amapereka mphamvu ku zida zapamwamba zopangira semiconductor.

1. Aluminiyamu Yaikulu Yopangira Kapangidwe: Chimango Chonyamula Katundu cha Zipangizo

Ma alloys awa amapanga maziko a zipinda zogwirira ntchito, zipinda zosamutsira ma wafer ndi nsanja zothandizira zida.

Mtundu wa aluminiyamu wa 6061, ndipo T651 ndi muyezo wagolide wa zinthu zofunika kwambiri.

T651 kutentha imagwiritsa ntchito kutambasula kolamulidwa pambuyo pozimitsa kuti ichotse kupsinjika kwamkati, kutsimikizira kukhazikika kwa mawonekedwe ngakhale mutagwiritsa ntchito CNC molondola kwambiri.

Kukhazikika kumeneku kumatsimikizira kuti manja a robotic wafer omwe amagwirira ntchito amatha kukwaniritsa kulondola kwa malo mkati mwa zipinda zotsekedwa za vacuum.

Kupanga kwa ma profiles a 6061-T651 semiconductor-grade m'dziko muno kwafika pachimake, kupereka zida zodalirika komanso zosinthika zomwe zingagwiritsidwe ntchito ndi OEMs.

2. Zipangizo Zopangira Machining Zotsika Pang'onopang'ono: Mapulatifomu a Substrate Otsika Kwambiri

Pogwiritsidwa ntchito popanga ma chamber liners ndi ma base plates olondola, zinthuzi zimafuna kusalala kwa sub-micron komanso kusinthasintha kwa zero pambuyo pa machining.

Magiredi oyambira akuphatikizapo 6061-T651 ndi mbale ya zida zotayira aluminiyamu ya MIC-6.

MIC-6 ndi chipangizo chopangidwa mwaluso kwambirimbale ya aluminiyamu yopangidwa ndikapangidwe kake kakang'ono kopanda kupsinjika kwambiri, koperekedwa kokonzeka kugwiritsidwa ntchito popanga zinthu zopirira kwambiri popanda chithandizo china chowonjezera chochepetsera kupsinjika.

Ngakhale ogulitsa m'dziko muno apita patsogolo kwambiri paukadaulo, ma plate akuluakulu olondola kwambiri amadalirabe pang'ono pazinthu zotumizidwa kunja, ndipo njira zina za m'dziko muno zikutseka kusiyana kwa magwiridwe antchito mwachangu.

3. Zitsulo ndi Kapangidwe Kothandizira: Envelopu ya Zipangizo ndi Mpweya Wopumira

Zipangizozi zimapanga zotchingira zida, mapanelo oteteza komanso njira zopumira mpweya kudzera m'mizere yopangira zinthu.

5052 ndi 3003 ndizofunika kwambiri pa gawoli. Amapereka kukana dzimbiri moyenera, kusinthasintha bwino komanso mitengo yotsika mtengo, zomwe zimapangitsa kuti akhale zida zogwiritsidwa ntchito kwambiri popanga zinthu za aluminiyamu zosafunikira.

Maunyolo onse ogulitsa zinthu m'dziko muno ali kale m'malo mwake, osadalira magwero akunja kuti apeze zofunikira pa pepala ndi chubu.

4. Zogwiritsidwa Ntchito mu Plasma Process: Zigawo Zovala za Etch Chamber

Zikayikidwa mkati mwa ma etcher ngati ma chamber liners, ma focus rings ndi ma process baffles, ziwalozi zimakumana ndi kuphulika kosalekeza kuchokera ku plasma yoopsa panthawi yokonza wafer.

Aluminiyamu ya 5083 ndiyo chinthu chosatsutsika chomwe chilipo pano.

Kuchuluka kwa magnesium m'thupi lake kumapereka kukana dzimbiri komanso nthawi yayitali yogwira ntchito m'malo ovuta a plasma, zomwe zimapangitsa kuti ikhale yogwiritsidwa ntchito kwambiri pazida zocheka.

Kusintha zinthu zogwiritsidwa ntchito m'nyumba za 5083 semiconductor kukuyenda mofulumira kwambiri, ndipo opanga zinthu m'nyumba tsopano akufanana ndi momwe zinthu zomwe zimatumizidwa kunja zimagwirira ntchito m'mafakitale ambiri.

5. Aluminiyamu Yoyera Kwambiri: Zigawo Zofunikira Zogwirira Ntchito Zotsuka

Zimagwiritsidwa ntchito pothira madontho ndi mitu ya shawa ya gasi, zigawozi zimakumana mwachindunji ndi ma wafer panthawi yoyika ndi kupukuta.

Miyezo ya kuyera kwachibadwa imayambira pa 4N5 (99.995%) mpaka 5N (99.999%).

Kuchuluka kwa chidetso kuyenera kulamulidwa mosamala pamlingo wochepa, chifukwa ngakhale kuipitsidwa pang'ono kwachitsulo kumatha kuwononga magulu onse a wafer ndikuchepetsa kuchuluka kwa zokolola.

Gawo la ukadaulo lomwe lili ndi zopinga zambiri, lomwe kale linkalamulidwa ndi opanga aku Japan ndi aku US, ngakhale opanga akunyumba akupita patsogolo kwambiri pa kafukufuku ndi chitukuko kuti akwaniritse zosowa za anthu onse.

6. Zipangizo Zogwirira Ntchito: Mayankho Otsogola Oyendetsera Kutentha

Amagwiritsidwa ntchito ngati zinthu zotenthetsera kutentha pa tchipisi tamphamvu kwambiri komanso zoyika mkati mwa zida za microwave.

Chopangidwa ndi aluminiyamu ya silicon carbide (Al-SiC) ndicho chinthu chachikulu kwambiri m'gululi.

Zimaphatikiza zopepukaubwino wa aluminiyamu ndi otsikaKufutukuka kwa kutentha ndi kutentha kwambiri kwa ceramic, kuthetsa mavuto omwe akhalapo kwa nthawi yayitali pakuwongolera kutentha mu zida za semiconductor zokhala ndi kuchuluka kwakukulu.

Uinjiniya Wapamwamba: Chowonjezera Chomaliza cha Magwiridwe Antchito

Ubwino wa zinthu zoyambira umakhazikitsa maziko, koma zokutira pamwamba zimatsimikiza moyo weniweni wa ntchito ndi kukhazikika kwa nthawi yayitali kwa zigawo za aluminiyamu.

Njira monga zophimba zotentha za anodizing ndi yttrium oxide (Y₂O₃) zimapanga chotchinga cholimba chomwe chimateteza zitsulo za aluminiyamu ku kuwonongeka kwa plasma ndi kuukiridwa ndi mankhwala.

Ukadaulo wapamwamba wopaka pamwamba udakali chimodzi mwa zopinga zazikulu pakukhazikitsa zida zonse za semiconductor zapakhomo.

Kuyambira mafelemu omangidwa a 6061 ndi zinthu zogwiritsidwa ntchito mu plasma 5083 mpaka zinthu zogwirira ntchito za aluminiyamu zoyera kwambiri komanso zokutira zapamwamba pamwamba, chilengedwe chonse cha zinthu zogwiritsidwa ntchito mu aluminiyamu chimathandizira pang'onopang'ono dziko lopangidwa ndi ma chip. Monga ogulitsa apadera a mapepala a aluminiyamu, mipiringidzo, machubu ndi ntchito zogwirira ntchito za CNC, timapereka zinthu zonse za 6061, 5052, 5083 ndi zina zogwiritsidwa ntchito mumakampani, zopangidwa motsatira ukhondo wokhwima komanso zofunikira pakulekerera. Gulu lathu lopanga zinthu mkati limathandizira kupanga zida za semiconductor ndi zinthu zogwiritsidwa ntchito, kuthandiza opanga zida padziko lonse lapansi kupanga maunyolo opereka zinthu olimba komanso otsika mtengo.