Izikena ze-lithography kanye nezinhlelo ze-etch zimi njengezingcwecwe zokukhiqiza ama-chip, ngokuvamile zithwala amanani angamakhulu ezigidi. Kodwa bambalwa ngaphandle komkhakha abaqaphela ukuthi uhlaka lwesakhiwo kanye nezingxenye zangaphakathi zala mathuluzi okunemba zakhiwe cishe ngokuphelele kusukela ku-"ebonakala sengathi"izinto ezithobekile: i-aluminium alloy. Lena akuyona i-aluminium ejwayelekile esetshenziselwa ozimele befasitela bezakhiwo, kodwa i-aluminium yezinga le-semiconductor eyenziwe ngokukhethekile eyenzelwe izindawo zokusebenza ezihlanzekile kakhulu nezinokunemba okuphezulu. Ngezansi kunencazelo ephelele yezinhlelo eziyisithupha zezinto ze-aluminium eziyinhloko ezinika amandla imishini yokukhiqiza ye-semiconductor ethuthukisiwe.

1. I-Aluminium Eyinhloko Yesakhiwo: Uhlaka Lokuthwala Imithwalo Lwemishini

Lezi zinhlobo ze-alloy zakha isakhiwo esiyisisekelo samakamelo enqubo, amakamelo okudlulisa ama-wafer kanye namapulatifomu okusekela imishini.

Ibanga eliphambili yi-aluminium engu-6061, kanti i-temperament ye-T651 isebenza njengendinganiso yegolide yezingxenye ezibalulekile zesakhiwo.

I-T651 temper isebenzisa ukwelula okulawulwayo ngemva kokucisha ukuze kuqedwe ukucindezeleka okusele kwangaphakathi, okuqinisekisa ukuzinza kobukhulu ngisho nangemva komshini we-CNC onembile kakhulu.

Lokhu kuzinza okungokwemvelo kuqinisekisa ukuthi izingalo zokuphatha i-wafer yerobhothi zingafinyelela ukunemba kokubeka ezingeni le-micron ngaphakathi kwamakamelo okuhlanza avaliwe.

Ukukhiqizwa kwasekhaya kwamaphrofayili e-semiconductor ebanga le-6061-T651 sekufinyelele ekuvuthweni okugcwele, okuletha ukuhlinzekwa okuthembekile nokungandiswa kwama-OEM emishini.

2. Izinto Zomshini Zokulungisa Eziphansi Ngokucindezeleka Okunembile: Amapulatifomu E-Substrate Aphansi Kakhulu

Ezisetshenziselwa ama-chamber liners kanye nama-base plate anembile, lezi zinto zidinga ukuthamba kwe-sub-micron kanye nokuguquguquka kwe-zero ngemuva komshini.

Amabanga ayisisekelo afaka ipuleti lamathuluzi e-aluminium eliyi-6061-T651 kanye ne-MIC-6.

I-MIC-6 iyi-cast enembileipuleti le-aluminium elenziwe ngeisakhiwo esincane esingenangcindezi ephansi ngokwemvelo, esilethwa silungele ukwenziwa kwemishini ebekezelela kakhulu ngaphandle kokwelashwa okwengeziwe kokuqeda ukucindezeleka.

Nakuba abahlinzeki basekhaya benze intuthuko enkulu kwezobuchwepheshe, amapuleti amakhulu kakhulu anefomethi yokunemba okuphezulu asathembele kancane ekuthengeni kwamanye amazwe, kanti ezinye izindlela zasekhaya zivala igebe lokusebenza ngokushesha.

3. Izakhiwo Zensimbi Eyenziwe Ngothayela Nezisizayo: Imvilophu Yemishini Nomoya Ongenisa Umoya

Lezi zinto zakha izivalo zemishini, amaphaneli okuvikela kanye nemigudu yokungenisa umoya emigqeni yokukhiqiza yendwangu.

I-5052 kanye ne-3003 zibusa kulesi sigaba. Zinikeza ukumelana nokugqwala okulinganiselayo, ukushibilika okuhle kakhulu kanye namanani angabizi kakhulu, okwenza zibe yizinto ze-aluminium ezingasetshenziswa kakhulu ezindaweni ze-semiconductor.

Iziteshi zokuphakelwa eziphelele zasekhaya sezivele zikhona, ngaphandle kokuthembela emithonjeni yaphesheya kwezilwandle ukuze kutholakale imininingwane ejwayelekile yeshidi kanye nepayipi.

4. Izinto Ezisetshenziswayo Zenqubo Yeplasma: Izingxenye Zokugqoka Zegumbi Lokumboza

Njengoba zifakwe ngaphakathi kwe-etchers njenge-chamber liners, ama-focus rings kanye nama-process baffles, lezi zingxenye zibhekene nokuhlaselwa okuqhubekayo okuvela ku-plasma enamandla ngesikhathi sokucubungula i-wafer.

I-aluminium alloy engu-5083 iyinto engaphikiswana ngayo lapha.

Okuqukethwe kwayo okuphezulu kwe-magnesium kunikeza ukumelana nokugqwala okuhle kakhulu kanye nokuphila isikhathi eside ezindaweni ezinzima ze-plasma, okwenza kube yinto esetshenziswa kakhulu emishinini yokuqopha.

Ukushintshaniswa kwe-5083 semiconductor consumables ekhaya kushesha ngesivinini esikhulu, njengoba abakhiqizi basekhaya manje sebefanisa ukusebenza kwezinto ezingenisiwe ezisetshenziswa kakhulu.

5. I-Aluminium Ehlanzekile Kakhulu: Izingxenye Ezibalulekile Zokusebenza Kwegumbi Lokuhlanza

Lezi zingxenye zisetshenziswa ekufakeni ama-sputtering target kanye nama-gas shower heads, zithintana ngqo nama-wafer ngesikhathi sokufakwa kanye nokuqoshwa kwe-etching.

Amazinga ajwayelekile okuhlanzeka aqala ku-4N5 (99.995%) kuya ku-5N (99.999%).

Amazinga okungcola kumele alawulwe ngokuqinile emazingeni okulandelela, njengoba ngisho nokungcola okuncane kwensimbi kungalimaza wonke ama-wafer batches futhi kunciphise isivuno.

Lokhu kusalokhu kuyisigaba sobuchwepheshe esinomkhawulo omkhulu, esibuswa abakhiqizi baseJapan nabase-US ngokomlando, yize abakhiqizi basekhaya benza intuthuko enkulu ye-R&D ukuze bafinyelele endaweni ephelele.

6. Izinto Ezihlanganisiwe Ezisebenzayo: Izixazululo Zokuphathwa Kokushisa Okuthuthukisiwe

Kusetshenziswa njengezinto zokususa ukushisa kuma-chips anamandla amakhulu kanye nokupakisha ngaphakathi kwemishini ye-microwave.

I-aluminium silicon carbide (Al-SiC) composite iyinto ehamba phambili kulesi sigaba.

Ihlanganisa ukukhanya okululainzuzo ye-aluminium enephansiukunwetshwa kokushisa kanye nokuqhuba okuphezulu kokushisa kwe-ceramic, ukuxazulula izinselele zokuphathwa kokushisa isikhathi eside emishinini ye-semiconductor enobuningi obukhulu.

Ubunjiniyela Bomphezulu: Isiphindaphindi Sokusebenza Kokugcina

Ikhwalithi yezinto eziyisisekelo ibeka isisekelo, kodwa izembozo zomphezulu zinquma impilo yangempela yesevisi kanye nokuqina kwesikhathi eside kwezingxenye ze-aluminium semiconductor.

Izinqubo ezifana ne-hard anodizing kanye ne-yttrium oxide (Y₂O₃) thermal spray coatings zakha isithiyo esiqinile esivikela ama-substrate e-aluminium ekugugulekeni kwe-plasma nasekuhlaselweni ngamakhemikhali.

Ubuchwepheshe obuthuthukisiwe bokumboza ubuso busengenye yezithiyo eziyinhloko ekubekweni kwendawo kwemishini ye-semiconductor yasekhaya.

Kusukela kufreyimu yesakhiwo engu-6061 kanye nezinto ezisetshenziswayo zeplasma ezingu-5083 kuya kuzingxenye ezisebenzayo ze-aluminium ezihlanzekile kakhulu kanye nokwembozwa okuthuthukisiwe, uhlelo oluphelele lwezinto ze-aluminium lusekela ngokuthula umhlaba oqhutshwa ngokunemba wokukhiqizwa kwama-chip. Njengomhlinzeki okhethekile wamashidi e-aluminium ebanga le-semiconductor, imigoqo, amashubhu kanye nezinsizakalo zomshini we-CNC oqondile, sinikeza iphothifoliyo ephelele yama-alloy angu-6061, 5052, 5083 kanye nezinye izinhlobo zezimboni, ezenziwe ngokuhlanzeka okuqinile kanye nezidingo zokubekezelelana ngobukhulu. Ithimba lethu lomshini wangaphakathi lisekela ukwenziwa ngokwezifiso kwezingxenye zesakhiwo semishini ye-semiconductor kanye nezinto ezisetshenziswayo, kusiza ama-OEM emishini yomhlaba wonke ukwakha izintambo zokuphakelwa eziqinile nezingabizi kakhulu.