Jwalo ka moetsi wa profeshenale ya ikgethang ka holipoleiti tsa aluminium, lithupa, lipeipi le lits'ebeletso tsa ho sebetsa ka nepo, re motlotlo ho hlahisa dihlahiswa tsa rona tsa alloy tsa aluminium tsa 5083 tse sebetsang hantle tse etseditsweng indasteri ya semiconductor ya lefatshe ka bophara. 5083 aluminium, alloy ya Al-Mg e sa phekolweng ke mocheso, e hlahella e le e nngwe ya disebediswa tsa meaho tse amohetsweng haholo disebedisweng tsa tlhahiso ya semiconductor, ditsamaiso tsa ho sebetsana le wafer le dikarolo tsa cleanroom, ka lebaka la matla a yona a ikgethang a mechini, ho hanyetsa mafome ho tsitsitseng haholo, ho tsamaisana hantle ha vacuum le bokgoni bo ikgethang ba ho sebetsa. E entswe ho fihlela maemo a SEMI le ditlhoko tse thata tsa cleanroom, aluminium ya rona ya 5083 e fana ka tshebetso e ke keng ya lekanngwa bakeng sa ditshebediso tsa bohlokwa tsa semiconductor moo bohloeki ba thepa, botsitso ba boholo le tshepo ya nako e telele di sa buisanweng.

1. Sebopeho sa Lik'hemik'hale le Bohloeki ba Thepa (Semiconductor Kereiti)

Aluminium ea rona ea 5083 e ikhethileng bakeng sa semiconductor e etsoa tlas'a taolo e thata ea tšepe ho netefatsa maemo a litšila a tlase haholo, ho latela litekanyetso tse phahameng ka ho fetisisa tsa bohloeki bakeng sa thepa ea maemo a elektroniki.

- Aluminium (Al): Tekanyo (≥93.5%)

- Magnesium (Mg): 4.0% – 4.9% (karolo e ka sehloohong e matlafatsang)

- Manganese (Mn): 0.4% – 1.0% (ntlafatso ea lijo-thollo le ntlafatso ea ho hanyetsa mafome)

- Chromium (Cr): 0.05% – 0.25% (thibelo ea ho bola ha li-granular)

- Mehlala (Si, Fe, Cu, Zn, Ti): E laoloa ka tieo ≤0.2% kakaretso, ha e na litšepe tse boima tse kotsi

Sebopeho sena sa lik'hemik'hale se leka-lekaneng hantle se felisa mefokolo ea ka hare, se fokotsa likotsi tsa ho tsoa ha khase tlas'a maemo a ultra high vacuum (UHV) 'me se netefatsa ho hanyetsa ka mokhoa o ikhethang lik'hemik'hale tse senyang tse sebelisoang hangata lits'ebetsong tsa ho fata, ho hloekisa le ho beha lintho ka har'a semiconductor. Ho fapana le indasteri e tloaelehileng ea 5083, mofuta oa rona oa sehlopha sa semiconductor o feta kalafong ea mocheso ea ho hloekisa le ho kopanya habeli, ho fihlella sebopeho se ts'oanang se nang le li-inclusions tse seng tsa tšepe, tsa bohlokoa bakeng sa ho boloka ho nepahala ha boemo ba submicron likarolong tsa semiconductor tsa boleng bo holimo.

2.Thepa ea Motheo ea Mekaniki le ea 'Mele (E Ntlafalitsoe bakeng sa Tikoloho ea Semiconductor)

Aluminium ea 5083 e fana ka tekanyo e sa bapisoeng ea matla, ho ductility le botsitso, e leng se etsang hore e be e loketseng bakeng sa likarolo tsa ho jara mojaro le ho nepahala lisebelisoa tsa semiconductor.

- Matla a ho Thatafala (H112/H321 Temperature): 270 – 340 MPa

- Matla a Tlhahiso (0.2% Offset): 120 – 215 MPa

- Ho lelefatsa: 12% – 20% (bokgoni bo botle ba ho bopa bakeng sa ho sebetsa ka thata)

- Botenya: 2.66 g/cm³ (bo bobebe, bo fokotsang ho hloka matla ha lisebelisoa le tšebeliso ea matla)

- Ho tsamaisa mocheso: 120 W/m·°C (ho qhala mocheso ka katleho bakeng sa lits'ebetso tsa ho potoloha mocheso)

- Katoloso ea Thermal Coefficient: 24.2×10⁻⁶/°C (botsitso bo ka boleloang esale pele tlas'a liphetoho tsa mocheso)

- Ho Tsamaisa Motlakase: 29% IACS (e loketse dikarolo tse laolwang ke electrostatic discharge (ESD))

- Bothata (HV): 75 – 90 (bo hanela ho tsofala le ho fetoha ha ditsamaiso tsa ho sebetsana le maqhubu a phahameng)

Molemo o ikhethang oa aluminium ea 5083 ke ho boloka matla a eona a matle ka mor'a ho tjheseletsa (≥90% ea matla a thepa ea motheo), ho felisa bofokoli ba sebopeho likamoreng tsa semiconductor tse tjheselitsoeng le likopanong tsa liphaephe. ​​Ho feta moo, e bonts'a ts'ebetso e ikhethang ea cryogenic: ka -196°C (mocheso oa naetrojene e metsi), matla a ho thaepa a eketseha ka 30%–50% ha a ntse a boloka ho tiea ho hoholo, e leng se etsang hore e be e phethahetseng bakeng sa lisebelisoa tsa ho sebetsana le semiconductor tsa mocheso o tlase.

3. Melemo ea Bohlokoa bakeng sa Likopo tsa Semiconductor

- Ho Hanela Tshenyo e Phahameng ka ho Fetisisa le ho Tsamaellana ha Kamore ea ho Hloekisa

Bongata ba magnesium ba aluminium ea 5083 bo fana ka khanyetso e ikhethang lik'hemik'hale tsa indasteri, lisebelisoa tsa ho hloekisa tsa alkaline, li-etchants tsa plasma le mongobo, tse tloaelehileng likamoreng tsa ho hloekisa tsa semiconductor. E etsa lera le teteaneng, le sireletsang oxide ka boiketsetso, le thibelang ho senyeha ha thepa le tšilafalo ea likaroloana. Lihlahisoa tsa rona li feta kalafong ea passivation ea beng ba tsona ho ntlafatsa botsitso ba bokaholimo, ho netefatsa tšilafalo ea lefela la ion le ho latela maemo a SEMI F72 a ho ntša khase bakeng sa litsamaiso tsa UHV.

- Botsitso ba Dikarolo le ho Sebetsa ka ho Nepahala

Ka khatello e fokolang e setseng le ho tšoana ho ikhethang ha sebopeho sa microstructural, khatello ea rona ea khatello ea maikutlo e imolloaAluminium ea 5083 (mocheso oa H112/H321) e lula e le tengmamello e tiileng ea litekanyo (± 0.01mm) kamora ho sebetsa ka mokhoa o rarahaneng oa CNC, ho seha ka laser le ho cheka masoba a tebileng. E tšehetsa ho qeta ha bokaholimo bo boreleli haholo (Ra ≤ 0.8μm) ka ho polishing ka motlakase le ho sila ka nepo, e leng habohlokoa bakeng sa ho fokotsa ho khomarela ha likaroloana ka likamoreng tsa vacuum le li-wafer carriers. Botsitso bona bo netefatsa ts'ebetso e tsitsitseng nakong ea lipotoloho tse likete tsa mocheso le ts'ebetso ea mechini.

- Ho Weldable e Phahameng le Botšepehi ba Sebopeho

Jwalo ka motswako o matla ka ho fetisisa wa aluminium o sa phekolweng ke mocheso, 5083 e thusa ho tjheseletsa ka matla, ntle le diphoso ka ho tjheseletsa ka TIG, MIG le laser ntle le tahlehelo e kgolo ya matla. Sena se dumella ho etswa ha mebele ya dikamore tsa semiconductor tse nang le sebopeho se seholo, diphaephe tsa kabo ya kgase le diforeimi tsa sebopeho tse ikgethileng, ho fedisa ditsela tsa ho dutla le ho netefatsa sekgahla sa ho dutla ha helium <10⁻⁹ mbar·L/s, e leng sa bohlokwa bakeng sa botsitso ba UHV.

- Tšepo ea Nako e Telele le Bokhoni ba Litšenyehelo

Aluminium ea 5083 e hanela ho hloleha ha mokhathala tlas'a khatello ea mechine ea potoloho le ho thothomela ha mocheso, e fana ka lilemo tse mashome tsa tšebeletso e tšepahalang libakeng tsa tlhahiso ea semiconductor lihora tse 24 ka letsatsi, matsatsi a 7 ka letsatsi, matsatsi a 7 ka letsatsi, matsatsi a 7 ka letsatsi. Bobebe ba eona bo fokotsa boima ba lisebelisoa ntle le ho fokotsa boima ba mojaro, ho fokotsa litšenyehelo tsa lipalangoang, tsa ho kenya le tsa ts'ebetso. Ha e kopantsoe le bokhoni ba rona ba ho sebetsa ka nepo, e fokotsa litšila tsa thepa le ho khutsufatsa linako tsa tlhahiso.

4. Likopo tsa Indasteri ea Semiconductor

Lipoleiti tsa rona tsa aluminium tsa 5083, lithupa, liphaephe le likarolo tse entsoeng ka mokhoa o ikhethileng li sebeletsa mekhahlelo ea bohlokoa ea tlhahiso ea semiconductor:

- Lisebelisoa tsa ho Etsa Wafer: Meaho ea kamore, lipoleiti tsa electrode, li-manifold tsa kabo ea khase, liforeimi tsa ho jara wafer, le matsoho a roboto

- Mekhoa ea ho fata le ho tlosa lintho tse itseng: Likarolo tsa kamore ea vacuum, masale a thebe, li-nozzle tsa khase, le lipoleiti tsa ho pholisa

- Mekhoa ea ho Hloekisa le ho Tšoara: Lisebelisoa tse nepahetseng, litataiso tsa ho tsamaea ka tsela e otlolohileng, liphaephe tsa lik'hemik'hale le likhoerekhoere tsa lisebelisoa

- Lisebelisoa tsa Teko le Tlhahlobo: Metheo e tsitsitseng ea litekanyo, likarolo tsa seteishene sa probe, le li-mount tsa optical

- Likarolo tse Ikhethang: Lithebe tsa cryogenic, matlo a sa senyeheng ke mafome, le likarolo tsa meaho tse sireletsehileng ho ESD

5. Netefatso ea rona ea Tlhahiso le Boleng

Re fana ka ditharollo tse felletseng tsa aluminium tsa 5083 ho kenyeletswa le dipoleiti tsa ho qetela tsa sile (botenya ba 0.5mm ho isa ho 400mm), dithupa tse ntshitsweng (bophara ba 3mm ho isa ho 300mm), dipeipi tse se nang moedi (OD 5mm ho isa ho 200mm) le dikarolo tse entsweng ka mochini wa CNC tse ikgethileng, tsohle di hlahisitswe tlasa ISO 9001 le ditsamaiso tsa taolo ya boleng bo ikgethileng ba semiconductor.

- Ho Latela Lintho: Litlaleho tsa liteko tse felletseng tsa fektheri (MTRs) bakeng sa sehlopha se seng le se seng, ho netefatsa ho latela ka botlalo ho tloha karolong e ka hare ho ingot ho ea karolong e felileng.

- Tsamaiso ea Kamore ea ho Hloekisa: Likarolo tsa bohlokoa tse entsoeng ka mechini ka likamoreng tsa ho hloekisa tsa Sehlopha sa 1000 ho thibela tšilafalo ea likaroloana

- Teko e Nepahetseng: Teko ea ultrasonic ea 100% (UT), teko ea eddy current (ECT) le tlhahlobo ea litekanyo

- Ho iketsetsa: Mehato e etselitsoeng motho ka mong, mekhoa ea ho phekola ka holim'a metsi (ho hloekisa ka motlakase, ho omisa oli, ho etsa hore lintho li se ke tsa tsamaea hantle) le ho lokisa lintho ka mokhoa o sa lokelang ho sebelisoa ho latela litšoantšo tsa bareki.

Bakeng sa bahlahisi ba di-semiconductor ba hlokang thepa e kopanyang matla a sebopeho, ho se sebetse hantle ha dikhemikhale, ho nepahala ha boholo le katleho ya ditjeo, sehlopha sa rona sa di-semiconductor ke sa sehlopha sa rona.motsoako oa aluminium oa 5083E eme e le khetho e ntle ka ho fetisisa. Re tšehelitsoe ke boiphihlelo ba rona ba ho sebetsana le aluminium le ho sebetsa ka nepo, re fana ka lihlahisoa tsa boleng bo holimo le tse tsitsitseng tse ntlafatsang ts'ebetso ea lisebelisoa, tse eketsang bophelo ba ts'ebeletso le ho fokotsa litšenyehelo tsohle tsa beng. Hore na o hloka liforomo tse tloaelehileng tsa aluminium kapa likarolo tse entsoeng ka mokhoa o felletseng, re fana ka litharollo tsa ho tloha qalong ho isa qetellong tse entsoeng ho feta maemo a thata ka ho fetisisa a indasteri ea semiconductor. Sebelisana le rona ho phahamisa lisebelisoa tsa hau tsa semiconductor ka bokhabane ba thepa bo tsamaisang tlhahiso le ts'epo tlhahisong e tsoetseng pele ea chip.