Imepụta Semiconductor na-achọ oke nkenke, na ụlọ-obi nke akụrụngwa dị oke mkpa dị ka CVD reactors na igwe etching — na-arụ ọrụ dị mkpa. Ntuziaka a na-enyocha ihe ndị dị mkpa imewe ụlọ yana ka aluminom dị ọcha dị elu si edozi isi ihe ịma aka ụlọ ọrụ.

Ihe 5 dị oke mkpa na-arụ ọrụ ụlọ ịnya ụgbọ ala (yana otu aluminom Excels)

1. Ultra-High Vacuum (UHV) ndakọrịta & mgbochi ntapu

Nsogbu: Mkpịsị ahụ anya na-emebi iguzosi ike n'ezi ihe.

Uru Aluminom:Ahụ arụrụ arụ CNC enweghị nkebisi aluminom billlets wepụ weld ihe. Alloy anyị 6061-T6 na-enweta <10⁻⁹ mbar·L/sk ọnụego ntapu helium.

2. Njikwa okpomọkụ: Nkwụsi ike n'okpuru nnukwu ịgba ígwè

Nsogbu: Warping na-ekpo ọkụ na-ebute mmerụ ahụ.

Ngwọta: Igwe anaghị agba nchara nke Aluminom (≈150 W / m·K) na-eme ka igwe anaghị agba nchara. Efere aluminom anyị emebere nke ọma na-ejikọta ọwa jụrụ oyi maka ịdị n'otu ± 0.5°C.

3. Plasma Corrosion Resistance na Harsh Environment

Data Point: Aluminom anodized (25μm+ ọkpụrụkpụ) na-akwado 10x ogologo CF₄/O₂ mkpughe plasma vs. enweghị ọgwụgwọ na-ebupụta.

4. Igwe Igwe Igwe Ọdụdọ: RF/Plasma Usoro Iguzosi ike n'ezi ihe

Gịnị mere aluminom? Ọdịmma ndọta dị nso-efu na-egbochi mgbagha ubi na etchers/ implants.

5. Ọnụ vs. Nrụpụta arụmọrụ

Ọmụmụ ihe: Dochie igwe anaghị agba ncharaụlọ na aluminumna-ebelata ọnụ ahịa ihe onwunwe site na 40% yana oge nhazi site na 35% (dabere na akara ụlọ ọrụ 2024).

Ngwọta Aluminom anyị maka ụlọ nkenke

Ụlọ ụlọ & mkpuchi

Ihe onwunwe: 5083/6061 Aluminom efere (ruo 150mm oké)

Usoro: igwe na-arụ ọrụ CNC na-arụ ọrụ na-arụ ọrụ na Ra ≤ 0.8μm elu imecha

Isi nkọwa: AMS 2772 ọgwụgwọ okpomọkụ, 100% ultrasonic ule

Ngwa nkesa gas

Ngwaahịa: Nkenke aluminom tubes (OD 3mm-200mm) na ime micro-bores

Teknụzụ: Mkpọpu mmiri miri emi (Ratio L/D 30:1), electropolishing

Nkwado Structural & Fasteners

Ihe: 7075-T651 Aluminom mkpara (oke ike na-oke ruru)

Nkwenye: ụkpụrụ SEMI F72 maka njikwa ọpụpụ

Kedu ihe kpatara ya na anyị ji emekọrịta ihe maka ụlọ ọrụ Semiconductor Chamber gị?

1. Ime ụlọ dị ọcha raara onwe ya nye: Ụlọ ọrụ klaasị 1000 na-egbochi mmetọ ahụ.

2. Ihe traceability: Mill ule akụkọ makaefere aluminom ọ bụla/ mkpanaka/tube.

3. Plasma-Kachasị mma imecha: Passivation nke onwe maka nguzogide corrosion.

4. Prototyping ngwa ngwa: 15-ụbọchị ụzọ oge maka mgbagwoju ụlọ geometry.