Ukwenziwa kwe-semiconductor kudinga ukunemba okwedlulele, futhi igumbi—inhliziyo yemishini ebucayi efana nama-rectors e-CVD nemishini yokufaka—idlala indima ebalulekile. Lo mhlahlandlela uhlola okubalulekile kwesakhiwo segumbi nokuthi ama-alloys e-aluminium anobumsulwa obuphezulu axazulula kanjani izinselelo ezibalulekile zemboni.

Izinto Ezi-5 Ezibucayi Zokusebenza Kwegumbi Lokushayela (Nendlela I-Aluminium Esebenza Ngayo)

1. Ukuvumelana kwe-Ultra-High Vacuum (UHV) kanye Nokuvimbela Ukuvuza

Inkinga: Ukuvuza kwe-Microscopic konakalisa ubuqotho benqubo.

I-Aluminium Advantage:Imizimba enomshini we-CNC engenamthungokusuka ku-aluminium billets asuse amaphuzu weld. Ingxubevange yethu ye-6061-T6 izuza <10⁻⁹ mbar·L/sec amanani okuvuza kwe-helium.

2. Ukuphathwa Okushisayo: Ukuzinza Ngaphansi Kokuhamba Ngebhayisikili Okudlulele

Inkinga: I-thermal warping idala ukungcoliswa kwezinhlayiyana.

Isixazululo: I-Aluminium's superior thermal conductivity (≈150 W/m·K) idlula insimbi engagqwali. Amapuleti ethu e-aluminium enziwe ngokwezifiso ahlanganisa iziteshi zokupholisa ngokufana okungu-±0.5°C.

3. I-Plasma Corrosion Resistance Ezindaweni Ezinzima

Iphoyinti Ledatha: I-Aluminiyamu e-Anodized (25μm+ ukujiya) imelana nokuchayeka kwe-plasma okungu-10x okungaphezulu kwe-CF₄/O₂ uma kuqhathaniswa nezindawo ezingalashiwe.

4. I-Magnetic Permeability: I-RF/Plasma Process Integrity

Kungani i-Aluminium? I-Near-zero magnetic permeability ivimbela ukuhlanekezela kwenkambu kuma-etchers/implanters.

5. Izindleko vs. Ukuthuthukisa Ukusebenza

I-Case Study: Ukushintsha okungenasici ngomshiniamakamelo ane-aluminiumkunciphisa izindleko zempahla ngo-40% kanye nesikhathi somshini ngo-35% (ngokusekelwe kumabhentshimakhi emboni ka-2024).

Izixazululo Zethu Ze-Aluminium Zamagumbi Okunemba

I-Chamber Bodies & Lids

Izinto: 5083/6061 Aluminium Plates (kufika ku-150mm ubukhulu)

Inqubo: Imishini ye-CNC ehambisana ne-vacuum ene-Ra ≤ 0.8μm yokuqedwa kwendawo

Imininingwane Ebalulekile: Ukwelashwa kokushisa kwe-AMS 2772, ukuhlolwa kwe-ultrasonic okungu-100%.

Izingxenye Zokusabalalisa Igesi

Imikhiqizo: Amashubhu e-aluminium anembile (OD 3mm-200mm) ane-micro-bores yangaphakathi

Ubuchwepheshe: Ukubhoboza imbobo ejulile (isilinganiso se-L/D 30:1), i-electropolishing

Ukusekelwa Kwesakhiwo & Izixhumi

Impahla: 7075-T651 Aluminium Rods (isilinganiso esiphezulu samandla kuya kwesisindo)

Ukuthobelana: Amazinga we-SEMI F72 okulawula ukukhipha umoya

Kungani Usebenzisana Nathi Ngephrojekthi Yakho Yegumbi Le-Semiconductor?

1. Imishini Yokuhlanza Igumbi Elizinikezele: Isikhungo se-Class 1000 sivimbela ukungcola kwezinhlayiya.

2. Ukulandelelwa Okubalulekile: Imibiko yokuhlolwa kwe-Mill yewonke amapuleti e-aluminium/induku/ithubhu.

3. Ukuqedwa Kwe-Plasma-Optimized: I-Proprietary passivation yokumelana nokugqwala.

4. I-Prototyping Esheshayo: Isikhathi sokuhola sezinsuku eziyi-15 sejometri yegumbi eliyinkimbinkimbi.