Kev tsim khoom semiconductor xav tau qhov tseeb, thiab lub chamber - lub plawv ntawm cov khoom siv tseem ceeb xws li CVD reactors thiab etching machines - ua lub luag haujlwm tseem ceeb. Phau ntawv qhia no tshawb txog chamber tsim qhov tseem ceeb thiab yuav ua li cas high-purity aluminium alloys daws teeb meem kev lag luam tseem ceeb.

5 Yam Tseem Ceeb Tsav Tsheb Ua Haujlwm (Thiab Yuav Ua Li Cas Aluminium Excels)

1. Ultra-High Vacuum (UHV) Compatibility & Tiv thaiv Leak

Teeb meem: Microscopic to ruin process integrity.

Aluminium Advantage:Seamless CNC tshuab lub cevlos ntawm aluminium billets tshem tawm cov ntsiab lus weld. Peb 6061-T6 alloy ua tiav <10⁻⁹ mbar·L/sec helium leak rates.

2. Kev Tswj Thermal: Kev ruaj ntseg nyob rau hauv kev caij tsheb kauj vab heev

Teeb meem: Thermal warping ua rau particle contamination.

Kev daws: Aluminium qhov zoo tshaj thermal conductivity (≈150 W / m·K) ua haujlwm zoo dua stainless hlau. Peb cov kev cai-fabricated txhuas daim hlau ua ke nrog cov cua txias rau ± 0.5 ° C uniformity.

3. Plasma Corrosion Resistance nyob rau hauv hnyav ib puag ncig

Cov ntaub ntawv taw qhia: Anodized aluminium (25μm + thickness) tiv taus 10x ntev CF₄ / O₂ plasma raug vs. tsis kho qhov chaw.

4. Sib nqus permeability: RF / Plasma txheej txheem kev ncaj ncees

Vim li cas Aluminium? Zero-zero magnetic permeability tiv thaiv kev cuam tshuam ntawm thaj chaw hauv etchers / implanters.

5. Tus nqi vs. Kev ua haujlwm zoo

Case Study: Hloov machined stainlessChambers nrog aluminiumtxo cov nqi khoom siv los ntawm 40% thiab lub sijhawm ua haujlwm los ntawm 35% (raws li 2024 cov qauv kev lag luam).

Peb cov kev daws teeb meem Aluminium rau Precision Chambers

Chamber Bodies & Lids

Khoom siv: 5083/6061 Aluminium Phaj (txog 150mm tuab)

Txheej txheem: Nqus-tshaj CNC machining nrog Ra ≤ 0.8μm nto tiav

Cov ntsiab lus tseem ceeb: AMS 2772 kev kho cua sov, 100% ultrasonic kuaj

Gas Distribution Cheebtsam

Khoom: Precision txhuas raj (OD 3mm-200mm) nrog micro-bores

Tech: Deep-qhov drilling (L / D piv 30: 1), electropolishing

Cov qauv kev txhawb nqa & Fasteners

Khoom siv: 7075-T651 Aluminium Rods (siab zog-rau-hnyav piv)

Ua raws li: SEMI F72 tus qauv rau kev tswj kev tawm tsam

Vim li cas koom tes nrog peb rau koj qhov Semiconductor Chamber Project?

1. Dedicated Cleanroom Machining: Chav Kawm 1000 qhov chaw tiv thaiv kev sib kis.

2. Cov ntaub ntawv Traceability: Mill xeem ntawv ceeb toom rautxhuas phaj/rod/tube.

3. Plasma-Optimized Finishing: Proprietary passivation rau corrosion kuj.

4. Ceev Prototyping: 15-hnub lub sij hawm ua rau cov chamber geometries complex.