O le gaosiga o Semiconductor e manaʻomia ai le saʻo tele, ma o le potu-o le fatu o mea taua e pei o CVD reactors ma masini etching-e faia se sao taua. O lenei ta'iala e su'esu'e ai mea e mana'omia mo le fa'atulagaina o potu ma pe fa'afefea ona fo'ia e u'amea alumini fa'amama maualuga lu'itau tau pisinisi.

5 Fa'ailoga Taua e Avea ai le Fa'atinoga o le Potu (Ma Fa'afefea Aluminum Excels)

1. Ultra-maualuga avanoa (UHV) talafeagai & Leak Puipuiga

Fa'afitauli: E fa'aleagaina le amio sa'o o le fa'agasologa.

Avanoa alumini:Tino fa'aogaina CNC e leai se meamai alumini billets aveese mata uelo. O la matou u'amea 6061-T6 ausia <10⁻⁹ mbar·L/sec fua faatatau leak helium.

2. Pulea Fa'avevela: Mausali i lalo o le uila tele

Fa'afitauli: O le vevela vevela e mafua ai le afaina o vaega.

Fofo: O le alumini e sili atu le fa'avevelaina o le vevela (≈150 W/m·K) e sili atu le u'amea. O a matou ipu alumini faʻapitoa faʻapipiʻi faʻapipiʻi auala malulu mo ± 0.5 ° C tutusa.

3. Plasma Corrosion Resistance i Siosiomaga Saua

Fa'amatalaga Fa'amatalaga: Anodized alumini (25μm + mafiafia) fa'asagatau 10x umi CF₄/O₂ plasma fa'aalia vs. luga e le'i togafitia.

4. Fa'atosina maneta: RF / Plasma Fa'agasologa Fa'amaoni

Aisea Aluminium? E latalata i-zero maneta e mafai ona taofia fa'alavelave fa'aletonu i totonu o etchers/implanters.

5. Tau vs. Fa'atonuga Fa'atinoga

Tulaga Su'esu'ega: Suia masini uameapotu ma aluminifa'aitiitia le tau o meafaitino ile 40% ma le taimi ole masini ile 35% (fa'avae ile 2024 alamanuia benchmarks).

O matou Fofo Alumini mo potu sa'o

Tino ma Ufiufi

Mea: 5083/6061 Papatusi Aluminium (e oo i le 150mm mafiafia)

Fa'agasologa: Fa'aogaina ole masini CNC ma le Ra ≤ 0.8μm fa'auma

Fa'amatalaga Autu: AMS 2772 togafitiga vevela, 100% su'ega ultrasonic

Vaega Fa'asoa kesi

Oloa: Fa'aumu alumini sa'o (OD 3mm-200mm) fa'atasi ai ma pona laiti i totonu

Tekinolosi: vili loloto-pu (L/D ratio 30:1), electropolishing

Lagolago Fauga & Fa'amau

Mea: 7075-T651 Aluminum Rods (maualuga le malosi-i-mamafa fua faatatau)

Tausi: SEMI F72 fa'ata'ita'iga mo le fa'aogaina o kasa

Aisea e faipaaga ai ma i matou mo lau Poloketi Semiconductor Chamber?

1. Fa'ameamea Fa'amama Potu: Vasega 1000 nofoaga e puipuia ai le fa'aleagaina o ma'ele'ele.

2. Mea e Su'esu'eina: Lipoti su'ega Mill moipu alumini uma/rod/tupa.

3. Plasma-Optimized Finishing: Pasivation fa'apitoa mo tete'e corrosion.

4. Fa'ata'ita'iga vave: 15-aso ta'ita'i taimi mo geometries potu lavelave.