Masana'antar Semiconductor tana buƙatar madaidaicin madaidaicin, kuma ɗakin - zuciyar kayan aiki masu mahimmanci kamar na'urori masu sarrafa CVD da injunan etching - suna taka muhimmiyar rawa. Wannan jagorar yana bincika mahimman abubuwan ƙira na ɗaki da kuma yadda tsaftataccen allo na aluminum ke warware ƙalubalen masana'antu.

5 Mahimman Abubuwan Abubuwan Tuƙi Ayyukan Chamber (Kuma Yadda Aluminum Excels)

1. Matsakaicin Maɗaukaki Mai Girma (UHV) & Rigakafin Leak

Matsala: Ƙwararren ƙwanƙwasa yana lalata amincin tsari.

Amfanin Aluminum:Jikin injinan CNC mara sumuldaga aluminum billlets kawar da maki weld. Alloy ɗin mu na 6061-T6 ya cimma <10⁻⁹ mbar·L/sec Helium leak rates.

2

Matsala: Warping thermal Warping yana haifar da gurɓataccen ƙwayar cuta.

Magani: Aluminum's m thermal conductivity (≈150 W / m · K) ya fi bakin karfe. Faranti na aluminium ɗinmu na al'ada yana haɗa tashoshi masu sanyaya don ± 0.5°C daidaituwa.

3. Juriya na lalata Plasma a cikin Muhalli mai tsanani

Bayanin Bayanai: Anodized aluminum (25μm+ kauri) yana jure 10x tsayin CF₄/O₂ fiddawar plasma vs. saman da ba a kula da shi ba.

4. Magnetic Permeability: RF/Plasma Tsari Tsari Tsari

Me yasa Aluminum? Kusa-da-sificin maganadisu yana hana karkatar da filin a cikin masu sakawa.

5. Farashin vs. Inganta Ayyukan Aiki

Nazarin Harka: Maye gurbin bakin da aka yi da injinchambers tare da aluminumyana rage farashin kayan da kashi 40% da lokacin injina da kashi 35% (dangane da ma'aunin masana'antu na 2024).

Maganin Aluminum ɗinmu don Madaidaicin ɗakunan

Rukunan Chamber & Lids

Abu: 5083/6061 Aluminum faranti (har zuwa 150mm kauri)

Tsari: Vacuum-jituwa CNC machining tare da Ra ≤ 0.8μm surface gama

Maɓalli Maɓalli: AMS 2772 maganin zafi, 100% gwajin ultrasonic

Abubuwan Rarraba Gas

Kayayyakin: Madaidaicin bututun aluminum (OD 3mm-200mm) tare da micro-bores na ciki

Tech: Zurfafa-rami (L/D rabo 30:1), electropolishing

Tallafin Tsarin & Masu ɗaure

Abu: 7075-T651 Aluminum Sanduna (high ƙarfi-to-nau rabo)

Yarda: Matsayin SEMI F72 don sarrafa fitar da gas

Me yasa Abokin Hulɗa da Mu don Aikin Rukunin Semiconductor ɗinku?

1. Ƙaddamar da Injin Tsabtace Tsabtace: Kayan aiki na Class 1000 yana hana gurɓataccen ƙwayar cuta.

2. Material Traceability: Mill gwajin rahotanni gakowane farantin aluminum/sanda/tube.

3. Ƙarƙashin Ƙarƙashin Ƙarƙashin Plasma: Ƙimar mallakar mallaka don juriya na lalata.

4. Samar da sauri: Lokacin jagorar kwanaki 15 don hadadden geometries na ɗakin gida.