Kupanga ma semiconductor kumafuna kulondola kwambiri, ndipo chipinda - mtima wa zida zofunika kwambiri monga ma CVD reactors ndi makina ojambulira - chimagwira ntchito yofunika kwambiri. Bukuli likuwunikira zofunikira za kapangidwe ka chipinda komanso momwe ma aluminiyamu oyeretsedwa kwambiri amathetsera zovuta zazikulu zamakampani.

Zinthu 5 Zofunika Kwambiri Zoyendetsa Chamber (Ndi Momwe Aluminium Amapambana)

1. Kugwirizana kwa Ultra-High Vacuum (UHV) & Kupewa Kutayikira

Vuto: Kutayikira kwa Microscopic kumawononga kukhulupirika.

Ubwino wa Aluminium:Matupi opangidwa ndi CNC opanda msokokuchokera ku aluminiyumu billets kuchotsa mfundo weld. Aloyi athu a 6061-T6 amakwaniritsa <10⁻⁹ mbar·L/sec helium kuchucha mitengo.

2. Kuwongolera kwa kutentha: Kukhazikika Pansi Pang'onopang'ono Kuthamanga Kwambiri

Vuto: Kutentha kwa kutentha kumayambitsa kuwonongeka kwa tinthu.

Yankho: Aluminium's superior thermal conductivity (≈150 W/m·K) imaposa chitsulo chosapanga dzimbiri. Ma mbale athu a aluminiyamu opangidwa mwamakonda amaphatikiza njira zoziziritsira ± 0.5 ° C zofanana.

3. Plasma Corrosion Resistance mu Malo Ovuta

Data Point: Aluminiyamu ya Anodized (25μm + makulidwe) imapirira 10x yayitali CF₄/O₂ kukhudzana ndi plasma motsutsana ndi malo osasinthidwa.

4. Magnetic Permeability: RF / Plasma Process Integrity

Chifukwa chiyani Aluminium? Kuthekera kwa maginito pafupi ndi zero kumalepheretsa kusokonekera kwamunda mu etchers/implanters.

5. Mtengo motsutsana ndi Kukhathamiritsa Kwantchito

Nkhani Yophunzira: Kusintha makina opanda bangazipinda zokhala ndi aluminiyamuamachepetsa mtengo wazinthu ndi 40% ndi nthawi yopangira makina ndi 35% (kutengera ma benchmarks amakampani a 2024).

Mayankho athu a Aluminium a Precision Chambers

Chamber Bodies & Lids

Zida: 5083/6061 Aluminiyamu mbale (mpaka 150mm wandiweyani)

Njira: Kupukuta kogwirizana ndi CNC ndi Ra ≤ 0.8μm pamwamba

Zofunika Kwambiri: AMS 2772 kutentha mankhwala, 100% akupanga kuyezetsa

Zida Zogawa Gasi

Zamgululi mwatsatanetsatane machubu zotayidwa (OD 3mm-200mm) ndi mkati yaying'ono bores

Chatekinoloje: Kubowola mozama (L/D chiŵerengero cha 30:1), electropolishing

Zothandizira Zapangidwe & Zomangamanga

Zida: 7075-T651 Aluminium Ndodo (chiyerekezo champhamvu-kulemera)

Kutsata: Miyezo ya SEMI F72 yowongolera kutulutsa mpweya

Chifukwa Chiyani Mumayanjana Nafe Pa Ntchito Yanu Ya Semiconductor Chamber?

1. Makina Odzipatulira Oyeretsa: Malo a Class 1000 amalepheretsa kuipitsidwa ndi tinthu tating'ono.

2. Material Traceability: Malipoti a Mill test formbale iliyonse ya aluminiyamu/ndodo/chubu.

3. Plasma-Optimized Finishing: Proprietary passivation for corrosion resistance.

4. Rapid Prototyping: 15-day lead time for complex chamber geometries.