Ṣiṣẹda semikondokito nilo pipe to gaju, ati iyẹwu — ọkan ti awọn ohun elo to ṣe pataki bi awọn reactors CVD ati awọn ẹrọ etching — ṣe ipa pataki kan. Itọsọna yii ṣawari awọn ohun elo apẹrẹ iyẹwu ati bii awọn ohun elo aluminiomu mimọ-giga ṣe yanju awọn italaya ile-iṣẹ bọtini.

Awọn Okunfa pataki 5 Ṣiṣẹ Iwakọ Iyẹwu (Ati Bii Aluminiomu Excels)

1. Ultra-High Vacuum (UHV) Ibamu & Idena Leak

Isoro: Airi jo ba ilana iyege.

Awọn anfani Aluminiomu:Ailokun CNC-machined aralati aluminiomu billets imukuro weld ojuami. 6061-T6 alloy wa ṣaṣeyọri <10⁻⁹ mbar·L/saya awọn oṣuwọn n jo helium.

2. Isakoso igbona: Iduroṣinṣin Labẹ Gigun kẹkẹ nla

Isoro: Gbona warping fa patiku koti.

Solusan: Aluminiomu ti o ga julọ itanna elekitiriki (≈150 W / m · K) ṣe apẹrẹ irin alagbara. Awọn awo alumọni alumọni ti a ṣe ti aṣa ṣepọ awọn ikanni itutu agbaiye fun ± 0.5 ° C iṣọkan.

3. Pilasima Ipata Resistance ni Harsh Ayika

Ojuami Data: Aluminiomu Anodized (sisanra 25μm+) duro 10x gigun CF₄/O₂ ifihan pilasima vs. awọn aaye ti a ko tọju.

4. Oofa Permeability: RF/Plasma Ilana Integrity

Kini idi ti aluminiomu? Itosi oofa oofa ti o sunmọ-odo ṣe idilọwọ ipadaru aaye ninu awọn etchers/awọn olufisinu.

5. Iye owo vs. Performance o dara ju

Iwadii Ọran: Rirọpo ẹrọ alagbaraawọn yara pẹlu aluminiomudinku awọn idiyele ohun elo nipasẹ 40% ati akoko ṣiṣe ẹrọ nipasẹ 35% (da lori awọn ipilẹ ile-iṣẹ 2024).

Awọn Solusan Aluminiomu wa fun Awọn iyẹwu Itọkasi

Chamber ara & Lids

Ohun elo: 5083/6061 Aluminiomu farahan (to 150mm nipọn)

Ilana: Ṣiṣe ẹrọ CNC ibaramu Vacuum pẹlu Ra ≤ 0.8μm dada ipari

Awọn alaye pataki: AMS 2772 itọju ooru, 100% idanwo ultrasonic

Gaasi Distribution irinše

Awọn ọja: Awọn tubes aluminiomu pipe (OD 3mm-200mm) pẹlu micro-bores inu

Tekinoloji: Liluho iho-jin (ipin L / D 30: 1), electropolishing

Awọn atilẹyin igbekalẹ & Awọn ohun-iṣọ

Ohun elo: 7075-T651 Awọn ọpa Aluminiomu (ipin agbara-si iwuwo giga)

Ibamu: Awọn iṣedede SEMI F72 fun iṣakoso ijade

Kini idi ti Alabaṣepọ Pẹlu Wa fun Ise agbese Iyẹwu Semiconductor rẹ?

1. Ifiṣootọ Cleanroom Machining: Kilasi 1000 apo idilọwọ particulate kontaminesonu.

2. Ohun elo Traceability: Mill igbeyewo iroyin fungbogbo aluminiomu awo/ ọpá / tube.

3. Pilasima-Imupe Ipari: Passivation ti ohun-ini fun idena ipata.

4. Dekun Prototyping: 15-ọjọ asiwaju akoko fun eka iyẹwu geometries.